Related papers: Measurement of nonlinear piezoelectric coefficient…
We report the successful detection of an audio signal via sideband modulation of a nonlinear piezoelectric micromechanical resonator. The 270$\times$96-$\mu$m resonator was shown to be reliable in audio detection for sound intensity levels…
This work reports the procedure for modeling piezoelectric acoustic resonators and filters at millimeter wave (mmWave). Different from conventional methods for lower frequency piezoelectric devices, we include both acoustic and…
Piezoelectric semiconductor III-Nitride nanostructures have received increasing interest as an alternative material for energy harvesters, sensors, and self-sustainable electronics, demanding well-clarification of their piezoelectric…
If driven sufficiently strongly, superconducting microresonators exhibit nonlinear behavior including response bifurcation. This behavior can arise from a variety of physical mechanisms including heating effects, grain boundaries or weak…
Mechanical nonlinearities dominate the motion of nanoresonators already at relatively small oscillation amplitudes. Although single and coupled two-degrees-of-freedom models have been used to account for experimentally observed nonlinear…
We report in this paper the design, fabrication and experimental characterization of a piezoelectric MEMS microgenerator. This device scavenges the energy of ambient mechanical vibrations characterized by frequencies in the range of 1 kHz.…
Atomically thin two dimensional (2D) layered materials have emerged as a new class of material for nanoelectromechanical systems (NEMS) due to their extraordinary mechanical properties and ultralow mass density. Among them, graphene has…
Nonlinear dynamics of a two-side electro-statically actuated capacitive micro-beam is studied. The piezoelectric actuation leads to the generation of an axial force along the length of the micro-beam and this is used as a tuning tool to…
Facilitated by low-noise laser frequency locking, optical microresonators with the Pockels effect have shown unprecedented high resolutions in sensing electrical field. However, the requirement for tunable and low-noise laser sources…
Nonlinearities play a critical role in the dynamics of mechanical resonators, enhancing sensitivity and enabling signal manipulation. Understanding the parameters affecting nonlinearities is crucial for developing strategies to counteract…
As a model of coupled nano-electromechanical resonantors we study two nonlinear driven oscillators with an arbitrary coupling strength between them. Analytical expressions are derived for the oscillation amplitudes as a function of the…
This research is on the nonlinear dynamics of a two-sided electrostatically actuated capacitive micro-beam. The microresonator is composed of silicon and PZT as a piezoelectric material. PZT is functionally distributed along the height of…
Piezoresistive strain gauges allow for electronic readout of mechanical deformations with high fidelity. As piezoresistive strain gauges are aggressively being scaled down for applications in nanotechnology, it has become critical to…
CMOS-MEMS resonators seamlessly integrated in advanced integrated circuit (IC) technology have the unique capability to enable unprecedented integration of stable frequency references, acoustic spectral processors, and physical sensors.…
We study a general model describing a self-detecting single electron transistor realized by a suspended carbon nanotube actuated by a nearby antenna. The main features of the device, recently observed in a number of experiments, are…
This work reports on a technology-agnostic and frequency-independent methodology combining a-priori modeling, Finite Element Analysis (FEA), and experimental results for the characterization of acoustic losses in interdigitated…
Piezoresponse Force Spectroscopy (PFS) is a powerful method widely used for measuring the nanoscale ferroelectric responses of the materials. However, it is found that certain non-ferroelectric materials can also generate similar responses…
We report measurements of viscoelastic properties of thin polymer films of 10-100 nm at the MHz range. These thin films are confined between a quartz crystal resonator and a millimetric bead layer, producing an increase of both resonance…
Piezoelectric resonators are a common building block for signal processing because of their miniature size, low insertion loss, and high quality factor. As consumer electronics push to millimeter waves frequencies, designers must increase…
We present measurements on nanomechanical resonators machined from Silicon-on-Insulator substrates. The resonators are designed as freely suspended Au/Si beams of lengths on the order of 1 - 4 um and a thickness of 200 nm. The beams are…