Related papers: Fabrication of micro fluidic cavities using Si-to-…
Reducing the fabrication cost of photonic integrated circuits while maintaining low optical losses and technological simplicity is essential for their wider implementation. In conventional manufacturing methods, the dielectric cladding…
We fabricated polygonal silica toroidal microcavities to achieve stable mechanical coupling with an evanescent coupler such as a tapered fiber. The polygonal cavity was fabricated by using a combination of isotropic etching, anisotropic…
3D printing of plastics, ceramics, and metals has existed for several decades and has revolutionized many areas of manufacturing and science. Printing of metals in particular has found a number of applications in fields as diverse as…
Glass is increasingly desired as a material for manufacturing complex microscopic geometries, from the micro-optics in compact consumer products to microfluidic systems for chemical synthesis and biological analyses. As the size, geometric,…
Silicon anodes offer high energy densities for next-generation lithium-ion batteries; however, their application is limited by severe volume expansion during cycling. Making silicon porous or nanostructured mitigates this expansion but…
High-purity glasses are used for their low optical and mechanical loss, which makes them an excellent material for oscillators in optical systems, such as inertial sensors. Complex geometries often require the assembly of multiple pieces of…
We have demonstrated what we believe to be the first waveguide photonic crystal cavity operating in the mid-infrared. The devices were fabricated from Ge23Sb7S70 chalcogenide glass on CaF2 substrates by combing photolithographic patterning…
We report on a compact, ultrahigh-vacuum compatible optical assembly to create large-scale, two-dimensional optical lattices for use in experiments with ultracold atoms. The assembly consists of an octagon-shaped spacer made from…
Glass materials play an increasingly important role in advanced technologies due to their superior physical properties. However, precise machining of glass remains a major challenge because of its brittleness and sensitivity to thermal and…
We employ a combined shape- and topology-optimization strategy to design manufacturable two-dimensional photonic crystal-based optical nanocavities that confine light to length scales well below the resonance wavelength. We present details…
Large-scale microfluidic microsystems with complex three-dimensional (3D) configurations are highly in demand by both fundamental research and industrial application, holding the potentials for fostering a wide range of innovative…
The heterogeneous integration of silicon with III-V materials provides a way to overcome silicon's limited optical properties toward a broad range of photonic applications. Hybrid modes are a promising way to make heterogeneous Si/III-V…
The goal of this work is a scientifically justified choice of efficient technological parameters of anodic bonding of silicon to glass, ensuring a minimum level of residual stresses. The relevance of this dissertation is determined by the…
Low-loss cavities are important in building high-coherence superconducting quantum computers. Generating high quality joints between parts is crucial to the realization of a scalable quantum computer using the circuit quantum…
We describe a micro-fabrication method to create concave features with ultra-low surface roughness in silica, either on the end facets of optical fibers or on flat substrates. The machining uses a single focused CO2 laser pulse. Parameters…
We present a laterally emitting, coupled cavity micro fluidic dye ring laser, suitable for integration into lab-on-a-chip micro systems. The micro-fluidic laser has been successfully designed, fabricated, characterized and modelled. The…
Three-dimensional (3D) superconducting microwave cavities with large mode volumes typically have high quality factors ($>10^6$). This is due to a reduced sensitivity to surface dielectric losses, which is the limiting source of dissipation…
We describe a technique for surface and sub-surface micro-machining of glass substrates using tightly focused femtosecond laser pulses at a wavelength of 1660 nm. Although silicate glass is normally transparent at this wavelength, the…
Despite several decades of development, microfluidics lacks a sealing material that can be readily fabricated, leak-tight under high liquid water pressure, stable over a long time, and vacuum compatible. In this paper, we report the…
We theoretically demonstrate high Quality factor micropillar cavities with record low mode volumes based on the TiO2/SiO2 material system. The proposed cavities have Q/V three orders of magnitude larger than previously reported ones. We…