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Recent advances in nanotechnology have created the need to manufacture three-dimensional nanostructures with controlled material composition. Focused Electron Beam Induced Deposition (FEBID) is a nanoprinting technique offering highest…

Mesoscale and Nanoscale Physics · Physics 2025-09-30 Jakub Jurczyk , Leo Brockhuis , Amalio Fernández-Pacheco , Ivo Utke

The fabrication of three-dimensional (3D) nanostructures is of great interest to many areas of nanotechnology currently challenged by fundamental limitations of conventional lithography. One of the most promising direct-write methods for 3D…

Mesoscale and Nanoscale Physics · Physics 2020-01-07 L. Skoric , D. Sanz-Hernández , F. Meng , C. Donnelly , S. Merino-Aceituno , A. Fernández-Pacheco

The focused ion beam (FIB) microscope is well established as a high-resolution machining instrument capable of site-selectively removing material down to the nanoscale. Beyond subtractive processing, however, the FIB can also add material…

Materials Science · Physics 2025-10-07 Frances Isabel Allen

Focused electron beam induced deposition (FEBID) is a powerful technique for 3D-printing of complex nanodevices. However, for resolutions below 10 nm, it struggles to control size, morphology and composition of the structures, due to a lack…

Focused electron beam induced deposition (FEBID) is an additive manufacturing technique uniquely suited for fabricating nanoscale 3D prototypes for a range of applications, including spintronic devices. However, the variation of growth…

Mesoscale and Nanoscale Physics · Physics 2026-05-15 Aurys Silinga , Keir Edgar , Stephen McVitie , Kayla Fallon , András Kovács , Rafal E. Dunin-Borkowski , Trevor P. Almeida

Focused electron beam induced deposition (FEBID) is a direct write technique for depositing materials on a support substrate akin to 3D printing with an electron beam (e-beam). Opportunities exist for merging this existing technique with…

Materials Science · Physics 2023-07-13 Ondrej Dyck , Andrew R. Lupini , Philip D. Rack , Jason Fowlkes , Stephen Jesse

The shift from two- to three-dimensional structures is not only a prominent trend in nanomagnetism but also reflects a broader movement across nanotechnology as a whole. Fields such as nanoelectronics, nanophotonics, data storage are poised…

Mesoscale and Nanoscale Physics · Physics 2025-08-13 Sameh Okasha , Trevor P. Almeida

Nanogranular material systems are promising for a variety of applications in research and development. Their physical properties are often determined by grain sizes, shapes, mutual distances and by the chemistry of the embedding matrix With…

Materials Science · Physics 2021-01-11 Cornelia Trummer , Robert Winkler , Harald Plank , Gerald Kothleitner , Georg Haberfehlner

This paper presents a detailed computational protocol for atomistic simulation of the formation and growth of metal-containing nanostructures during the Focused Electron Beam Induced Deposition (FEBID) process. The protocol is based upon…

Chemical Physics · Physics 2023-09-06 Alexey Prosvetov , Alexey V. Verkhovtsev , Gennady B. Sushko , Andrey V. Solov'yov

We report on a nanomechanical engineering method to monitor matter growth in real time via e-beam electromechanical coupling. This method relies on the exceptional mass sensing capabilities of nanomechanical resonators. Focused electron…

Direct electron beam writing is a powerful tool for fabricating complex nanostructures in a single step. The electron beam locally cleaves the molecules of an adsorbed gaseous precursor to form a deposit, similar to 3D printing but without…

Materials Science · Physics 2024-05-14 Katja Höflich , Krzysztof Mackosz , Chinmai S. Jureddy , Aleksei Tsarapkin , Ivo Utke

Three-dimensional (3D) nanomagnetism is a rapidly developing field within magnetic materials research, where exploiting the third dimension unlocks opportunities for innovative applications in areas such as sensing, data storage, and…

Mesoscale and Nanoscale Physics · Physics 2025-06-18 Sabri Koraltan , Fabrizio Porrati , Robert Kraft , Sven Barth , Markus Weigand , Claas Abert , Dieter Suess , Michael Huth , Sebastian Wintz

In the majority of cases nanostructures prepared by focused electron beam induced deposition (FEBID) employing an organometallic precursor contain predominantly carbon-based ligand dissociation products. This is unfortunate with regard to…

Mesoscale and Nanoscale Physics · Physics 2017-05-01 Evgeniya Begun , Oleksandr V. Dobrovolskiy , Maksym Kompaniiets , Roland Sachser , Christian Gspan , Harald Plank , Michael Huth

This study introduces a novel method for the deterministic fabrication of metallic nanostructures with controlled geometry and composition on suspended, single mode tapered optical nanofibers (TNFs) using a tailored Blurred Electron Beam…

The growth of iron-containing nanostructures in the process of focused electron beam-induced deposition (FEBID) of Fe(CO)$_5$ is studied by means of atomistic irradiation-driven molecular dynamics (IDMD) simulations. The geometrical…

Materials Science · Physics 2023-09-06 Alexey Prosvetov , Alexey V. Verkhovtsev , Gennady Sushko , Andrey V. Solov'yov

Media with engineered magnetization are essential building blocks in superconductivity, magnetism and magnon spintronics. However, the established thin-film and lithographic techniques insufficiently suit the realization of planar…

The development of modern metal deposition techniques like Focused Ion/Electron Beam Induced Deposition FIBID/FEBID relies heavily on the availability of metal-organic precursors of particular properties. To create a new precursor,…

Mesoscale and Nanoscale Physics · Physics 2025-11-06 Benedykt R. Jany , Katarzyna Madajska , Aleksandra Butrymowicz-Kubiak , Franciszek Krok , Iwona B. Szymańska

The present paper intends to be a new study of a widely used precursor in nanostructure deposition and FEBID processes with a focus on its fragmentation at collisions with low-energy electrons. Newer developments in nanotechnology with…

Materials Science · Physics 2022-09-28 Maria Pintea , Nigel Mason , Maria Tudorovskaya

We demonstrate the use of individual magnetic nanowires (NWs), grown by focused electron beam induced deposition (FEBID), as scanning magnetic force sensors. Measurements of their mechanical susceptibility, thermal motion, and magnetic…

Mesoscale and Nanoscale Physics · Physics 2020-04-22 H. Mattiat , N. Rossi , B. Gross , J. Pablo-Navarro , C. Magén , R. Badea , J. Berezovsky , J. M. De Teresa , M. Poggio

Nanoscale fabrication and characterisation techniques critically underpin a vast range of fields, including materials science, nanoelectronics and nanobiotechnology. Focused ion beam (FIB) techniques are particularly appealing due to their…

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