English
Related papers

Related papers: Sparsity-Based Super Resolution for SEM Images

200 papers

High resolution nanoscale imaging in liquid environments is crucial for studying molecular interactions in biological and chemical systems. In particular, electron microscopy is the gold-standard tool for nanoscale imaging, but its…

Soft Condensed Matter · Physics 2015-07-20 Wayne Yang , Yuning Zhang , Michael Hilke , Walter Reisner

The appearance of direct electron detectors marked a new era for electron diffraction. Their high sensitivity and low noise opens the possibility to extend electron diffraction from transmission electron microscopes (TEM) to lower energies…

Applied Physics · Physics 2025-02-18 Nikita Denisov , Andrey Orekhov , Johan Verbeeck

We theoretically demonstrate the ability of electron beams to probe the nonlinear photonic response with nanometer spatial resolution, well beyond the capabilities of existing optical techniques. Although the interaction of electron beams…

Mesoscale and Nanoscale Physics · Physics 2020-12-30 Andrea Konečná , Valerio Di Giulio , Vahagn Mkhitaryan , Claus Ropers , F. Javier García de Abajo

An image super-resolution method from multiple observation of low-resolution images is proposed. The method is based on sub-pixel accuracy block matching for estimating relative displacements of observed images, and sparse signal…

Computer Vision and Pattern Recognition · Computer Science 2014-02-18 Toshiyuki Kato , Hideitsu Hino , Noboru Murata

Low-energy electron microscopy (LEEM) is a surface science method that works primarily in the UHV environment. It provides information complementary to the other established techniques: it extends the limited view of scanning probe…

Mesoscale and Nanoscale Physics · Physics 2025-07-16 Jan Čechal , Pavel Procházka

Particle beam microscopy (PBM) performs nanoscale imaging by pixelwise capture of scalar values representing noisy measurements of the response from secondary electrons (SEs) integrated over a dwell time. Extended to metrology, goals…

Data Analysis, Statistics and Probability · Physics 2023-08-15 Akshay Agarwal , Minxu Peng , Vivek K. Goyal

The technological advance of High Numerical Aperture Extreme Ultraviolet Lithography (High NA EUVL) has opened the gates to extensive researches on thinner photoresists (below 30nm), necessary for the industrial implementation of High NA…

Computer Vision and Pattern Recognition · Computer Science 2023-10-24 Sara Sacchi , Bappaditya Dey , Iacopo Mochi , Sandip Halder , Philippe Leray

We demonstrate a multi-beam scanning transmission electron microscopy (STEM) imaging that integrates down-sampling with super-resolution image reconstruction via a compressive sensing framework. A custom condenser aperture with six randomly…

Instrumentation and Detectors · Physics 2026-03-19 Akira Yasuhara , Takumi Sannomiya , Ryoichi Horisaki

The ability to resolve detail in the object that is being imaged, named by resolution, is the core parameter of an imaging system. Super-resolution is a class of techniques that can enhance the resolution of an imaging system and even…

Data Structures and Algorithms · Computer Science 2022-10-13 Yaonan Jin , Daogao Liu , Zhao Song

Coherent spin resonance methods such as nuclear magnetic resonance (NMR) and electron spin resonance (ESR) spectroscopy have led to spectrally highly sensitive, non-invasive quantum imaging techniques with groundbreaking applications in…

The evolution of the scanning modules for scanning transmission electron microscopes (STEM) has realized the possibility to generate arbitrary scan pathways, an approach currently explored to improve acquisition speed and to reduce electron…

Compressed sensing is an imaging paradigm that allows one to invert an underdetermined linear system by imposing the a priori knowledge that the sought after solution is sparse (i.e., mostly zeros). Previous works have shown that if one…

Image and Video Processing · Electrical Eng. & Systems 2023-12-05 Nicholas Dwork , Erin K. Englund

Harnessing electron spin is crucial in developing energy-saving and high-speed devices for the next generation. In this scheme, visualizing spin-polarized electronic states aids in designing and developing new materials and devices.…

Materials Science · Physics 2024-04-03 Koichiro Yaji , Shunsuke Tsuda

Electron microscopy (EM) has been instrumental in our understanding of biological systems ranging from subcellular structures to complex organisms. Although EM reveals cellular morphology with nanoscale resolution, it does not provide…

We propose a new wide-field imaging method that exploits the Localized Surface Plasmon Resonance phenomenon to produce super-resolution images with an optical microscope equipped with a custom design polarization analyzer module. In this…

Instrumentation and Methods for Astrophysics · Physics 2023-10-09 Andrey Alexandrov , Takashi Asada , Fabio Borbone , Valeri Tioukov , Giovanni De Lellis

High-resolution transmission electron microscopy (HRTEM) is crucial for observing material's structural and morphological evolution at Angstrom scales, but the electron beam can alter these processes. Devices such as CMOS-based…

Materials Science · Physics 2025-12-04 Brian Lee , Meng Li , Judith C Yang , Dmitri N Zakharov , Xiaohui Qu

Instrumentation developments in electron energy-loss spectroscopy (EELS) in the scanning transmission electron microscope (STEM) one decade ago paved the way for combining milli-electronvolt energy resolution in spectroscopy with…

Mesoscale and Nanoscale Physics · Physics 2024-10-15 Benedikt Haas , Christoph T. Koch , Peter Rez

This work presents a new super-resolution imaging approach by using subwavelength hole resonances. We employ a subwavelength structure in which an array of tiny holes are etched in a metallic slab with the neighboring distance $\ell$ that…

Optics · Physics 2020-10-07 Junshan Lin , Hai Zhang

In traditional optical imaging systems, the spatial resolution is limited by the physics of diffraction, which acts as a low-pass filter. The information on sub-wavelength features is carried by evanescent waves, never reaching the camera,…

Optics · Physics 2018-12-13 Oren Solomon , Yonina C. Eldar , Maor Mutzafi , Mordechai Segev

Raman microscopy is a valuable tool for detecting physical and chemical properties of a sample material. When probing nanomaterials or nanocomposites the spatial resolution of Raman microscopy is not always adequate as it is limited by the…