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We measure the frequency dependence of the mechanical quality factor (Q) of SiN membrane oscillators and observe a resonant variation of Q by more than two orders of magnitude. The frequency of the fundamental mechanical mode is tuned…

We realize a nondegenerate parametric amplifier in an ultrahigh $Q$ mechanical membrane resonator and demonstrate two-mode thermomechanical noise squeezing. Our measurements are accurately described by a two-mode model that attributes this…

Quantum Physics · Physics 2015-07-17 Y. S. Patil , S. Chakram , L. Chang , M. Vengalattore

All quantum optomechanics experiments to date operate at cryogenic temperatures, imposing severe technical challenges and fundamental constraints. Here we present a novel design of on-chip mechanical resonators which exhibit fundamental…

Mesoscale and Nanoscale Physics · Physics 2016-04-07 Richard A. Norte , Joao P. Moura , Simon Gröblacher

We study the optomechanical properties of stoichiometric SiN resonators through a combination of spectroscopic and interferometric imaging techniques. At room temperature, we demonstrate ultrahigh quality factors of $5 \times 10^7$ and a $f…

Mesoscale and Nanoscale Physics · Physics 2015-06-17 S. Chakram , Y. S. Patil , L. Chang , M. Vengalattore

We image and characterize the mechanical modes of a 2D drum resonator made of hBN suspended over a high-stress Si$_3$N$_4$ membrane. Our measurements demonstrate hybridization between various modes of the hBN resonator and those of the…

Mesoscale and Nanoscale Physics · Physics 2023-03-10 David Jaeger , Francesco Fogliano , Thibaud Ruelle , Aris Lafranca , Floris Braakman , Martino Poggio

Optomechanical devices in which a flexible SiN membrane is placed inside an optical cavity allow for very high finesse and mechanical quality factor in a single device. They also provide fundamentally new functionality: the cavity detuning…

Quantum Physics · Physics 2008-11-11 Jack C. Sankey , Andrew M. Jayich , Benjamin M. Zwickl , Cheng Yang , Jack G. E. Harris

We report on low mechanical loss in a high-stress silicon nitride (Si_{3}N_{4}) membrane at temperatures below 100 mK. We isolate a membrane via a phononic shield formed within a supporting silicon frame, and measure the mechanical quality…

Mesoscale and Nanoscale Physics · Physics 2016-11-04 R. Fischer , N. S. Kampel , G. G. T. Assumpção , P. -L. Yu , K. Cicak , R. W. Peterson , R. W. Simmonds , C. A. Regal

We study high-stress SiN films for reaching the quantum regime with mesoscopic oscillators connected to a room-temperature thermal bath, for which there are stringent requirements on the oscillators' quality factors and frequencies. Our SiN…

Quantum Physics · Physics 2010-06-07 D. J. Wilson , C. A. Regal , S. B. Papp , H. J. Kimble

Using Fano-type guided resonances (GRs) in photonic crystal (PhC) slab structures, we numerically and experimentally demonstrate optical reflectivity enhancement of high-Q SiNx membrane-type resonators used in membrane-in-the-middle…

We report the confinement of an optomechanical micro-oscillator in a squeezed thermal state, obtained by parametric modulation of the optical spring. We propose and implement an experimental scheme based on parametric feedback control of…

Mesoscale and Nanoscale Physics · Physics 2015-06-17 A. Pontin , M. Bonaldi , A. Borrielli , F. S. Cataliotti , F. Marino , G. A. Prodi , E. Serra , F. Marin

We present a highly reflective, sub-wavelength-thick membrane resonator featuring high mechanical quality factor and discuss its applicability for cavity optomechanics. The $88.5~\text{nm}$ thin stoichiometric silicon-nitride membrane,…

On-chip actuation and readout of mechanical motion is key to characterize mechanical resonators and exploit them for new applications. We capacitively couple a silicon nitride membrane to an off resonant radio-frequency cavity formed by a…

Mesoscale and Nanoscale Physics · Physics 2020-07-21 A. N. Pearson , K. E. Khosla , M. Mergenthaler , G. A. D. Briggs , E. A. Laird , N. Ares

High-quality-factor ($Q$) mechanical resonators are essential components for precise sensing and control of mechanical motion at a quantum level. While amorphous materials such as SiN have been widely used in high-$Q$ mechanical resonators…

Ponderomotive squeezing of light, where a mechanical oscillator creates quantum correlations between the phase and amplitude of the interacting light field, is a canonical signature of the quantum regime of optomechanics. At room…

Quantum Physics · Physics 2024-02-16 Guanhao Huang , Alberto Beccari , Nils J. Engelsen , Tobias J. Kippenberg

We realise a simple and robust optomechanical system with a multitude of long-lived ($Q>10^7$) mechanical modes in a phononic-bandgap shielded membrane resonator. An optical mode of a compact Fabry-Perot resonator detects these modes'…

Optomechanical accelerometers promise quantum-limited readout, high detection bandwidth, self-calibration, and radiation pressure stabilization. We present a simple, scalable platform that enables these benefits with nano-$g$ sensitivity at…

Mesoscale and Nanoscale Physics · Physics 2022-09-01 Mitul Dey Chowdhury , Aman R. Agrawal , Dalziel J. Wilson

We demonstrate a high-Q ($>5 \times 10^{6}$) swept-frequency membrane mechanical resonator achieving octave resonance tuning via an integrated heater and an unprecedented acceleration noise floor below 1 $\mu$g Hz$^{-1/2}$ for frequencies…

Applied Physics · Physics 2018-08-31 Raphael St-Gelais , Simon Bernard , Christoph Reinhardt , Jack Sankey

We demonstrate a cryogenic optomechanical system comprising a flexible Si3N4 membrane placed at the center of a free-space optical cavity in a 400 mK cryogenic environment. We observe a mechanical quality factor Q > 4 x 10^6 for the 261-kHz…

Milligram-scale resonators have been shown to be suitable for the creation of 3-mode optoacoustic parametric amplifiers, based on a phenomena first predicted for advanced gravitational-wave detectors. To achieve practical optoacoustic…

Optomechanical SiN nano-oscillators in high-finesse Fabry-Perot cavities can be used to investigate the interaction between mechanical and optical degree of freedom for ultra-sensitive metrology and fundamental quantum mechanical studies.…

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