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This research is on the nonlinear dynamics of a two-sided electrostatically actuated capacitive micro-beam. The microresonator is composed of silicon and PZT as a piezoelectric material. PZT is functionally distributed along the height of…
Microelectromechanical systems (MEMS) resonators serve as frequency selective components in applications ranging from biology to communications. In this paper, the dynamic behavior of an RF MEMS disk resonator is formulated using an…
We describe and demonstrate a method by which the nonlinear piezoelectric properties of a piezoelectric material may be measured by detecting the force that it applies on a suspended micromechanical resonator at one of its mechanical…
Due to the rapid growth in demand for power for sensing devices located in remote locations, scientists' attention has been drawn to vibration energy harvesting as an alternative to batteries. As a result of over two decades of micro-scale…
The dynamics of nanomechanical resonators driven by both low- and high-frequency signals is studied. Considering, as an example, resonators made of a doubly-clamped beam with magnetomotive driving, it is shown that three-frequency…
The use of integrated MicroElectroMechanical systems (MEMS) is recently spread thanks to their improved sensitivity, accuracy and reliability. Accurate preliminary computations born from the need of high precision in the manufacturing…
We report in this paper the design, fabrication and experimental characterization of a piezoelectric MEMS microgenerator. This device scavenges the energy of ambient mechanical vibrations characterized by frequencies in the range of 1 kHz.…
The interactions between parametrically and directly driven vibration modes of a clamped-clamped beam resonator are studied. An integrated piezoelectric transducer is used for direct and parametric excitation. First, the parametric…
A technique to measure microscopic rotational motion is presented. When a small fluorescent polystyrene microsphere is attached to a larger polystyrene microsphere, the larger sphere acts as a lens for the smaller microsphere and provides…
Frequency dependent dynamic behavior in Piezoresponse Force Microscopy (PFM) implemented on a beam-deflection atomic force microscope (AFM) is analyzed using a combination of modeling and experimental measurements. The PFM signal comprises…
This paper is concerned with the long-time dynamical behavior of a piezoelectric system with magnetic effect, which has nonlinear damping terms and external forces with a parameter. At first, we use the nonlinear semigroup theory to prove…
We analytically investigate the nonlinear response of a damped doubly clamped nanomechanical beam under static longitudinal compression which is excited to transverse vibrations. Starting from a continuous elasticity model for the beam, we…
This research is on the dynamics of electrostatically actuated radial-contour mode microring resonators. The governing equation of motion is derived by the minimization of the Hamiltonian and generalized to include the viscous damping…
The extensive research and development of micromechanical resonators is trying to allow the use of these devices for highly sensitive applications. Microcantilevers are some of the simplest MEMS structure and had been proved to be a good…
This paper concerns the experimental validation of some mathematical models previously developed by the authors, to predict the static behaviour of microelectrostatic actuators, basically free-clamped microbeams. This layout is currently…
The nanobeam resonator is the key mechanical component in the nano-electromechanical system. In addition to its high frequency originating from its low dimension, the performance is significantly influenced by the circumstances, especially…
We developed a lattice dynamical theory of an atomically-thin compressional piezoelectric resonator. Acoustic and optical dynamic displacement response functions are derived and account for frequency-dependent electromechanical coupling.…
Rotations of microscopic magnetic particles, magnetosomes, embedded into the cytoskeleton and subjected to the influence of an ac magnetic field and thermal noise are considered. Magnetosome dynamics is shown to comply with the conditions…
The electrical response of two-dimensional electron gas to vibrations of a nanomechanical cantilever containing it is studied. Vibrations of perpendicularly oriented cantilevers are experimentally shown to change oppositely the conductivity…
Bistability in nanomechanical resonators can be exploited for sensing, signal processing, and memory applications due to its potential for switching and high sensitivity to external stimuli. External vibration can be used to drive a…