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We study the transverse oscillatory modes of nanomechanical silicon nitride strings under high tensile stress as a function of geometry and mode index m <= 9. Reproducing all observed resonance frequencies with classical elastic theory we…

Mesoscale and Nanoscale Physics · Physics 2015-05-18 Quirin P. Unterreithmeier , Thomas Faust , Jorg P. Kotthaus

High-stress Si$_3$N$_4$ nanoresonators have become an attractive choice for electro- and optomechanical devices. Membrane resonators can achieve quality factor ($Q$) - frequency ($f$) products exceeding $10^{13}$ Hz, enabling (in principle)…

Mesoscale and Nanoscale Physics · Physics 2016-03-07 A. H. Ghadimi , D. J. Wilson , T. J. Kippenberg

Mechanical dissipation poses an ubiquitous challenge to the performance of nanomechanical devices. Here we analyze the support-induced dissipation of high-stress nanomechanical resonators. We develop a model for this loss mechanism and test…

Mesoscale and Nanoscale Physics · Physics 2011-03-28 I. Wilson-Rae , R. A. Barton , S. S. Verbridge , D. R. Southworth , B. Ilic , H. G. Craighead , J. M. Parpia

The damping rates of high quality factor nanomechanical resonators are well beyond intrinsic limits. Here, we explore the underlying microscopic loss mechanisms by investigating the temperature-dependent damping of the fundamental and third…

Mesoscale and Nanoscale Physics · Physics 2014-03-13 Thomas Faust , Johannes Rieger , Maximilian J. Seitner , Jörg P. Kotthaus , Eva M. Weig

Dielectric membranes with exceptional mechanical and optical properties present one of the most promising platforms in quantum opto-mechanics. The performance of stressed silicon nitride nanomembranes as mechanical resonators notoriously…

We investigate the influence of gold thin-films subsequently deposited on a set of initially bare, doubly clamped, high-stress silicon nitride string resonators at room temperature. Analytical expressions for resonance frequency, quality…

Mesoscale and Nanoscale Physics · Physics 2014-11-25 Maximilian J. Seitner , Katrin Gajo , Eva M. Weig

We experimentally and theoretically investigate mechanical nanooscillators coupled to the light in an optical ring resonator made of dielectric mirrors. We identify an optomechanical damping mechanism that is fundamentally different to the…

High-stress silicon nitride nanostrings are a promising system for sensing applications because of their ultra-high mechanical quality factors (Qs). By performing thermomechanical calibration across multiple vibrational modes, we are able…

Mesoscale and Nanoscale Physics · Physics 2012-04-26 A. Suhel , B. D. Hauer , T. S. Biswas , K. S. D. Beach , J. P. Davis

We investigate the effect of free electrons on the quality factor (Q) of a metallic nanomechanical resonator in the form of a thin elastic beam. The flexural and longitudinal modes of the beam are modeled using thin beam elasticity theory,…

Mesoscale and Nanoscale Physics · Physics 2013-05-21 Ze'ev Lindenfeld , Ron Lifshitz

Observation of quantum phenomena in cryogenic, optically cooled mechanical resonators has been recently achieved by a few experiments based on cavity optomechanics. A well-established experimental platform is based on a thin film…

We study the mechanical quality factors of bilayer aluminum/silicon-nitride membranes. By coating ultrahigh-Q Si3N4 membranes with a more lossy metal, we can precisely measure the effect of material loss on Q's of tensioned resonator modes…

Mesoscale and Nanoscale Physics · Physics 2012-05-08 P. -L. Yu , T. P. Purdy , C. A. Regal

In strained mechanical resonators, the concurrence of tensile stress and geometric nonlinearity dramatically reduces dissipation. This phenomenon, dissipation dilution, is employed in mirror suspensions of gravitational wave interferometers…

The small mass and high coherence of nanomechanical resonators render them the ultimate force probe, with applications ranging from biosensing and magnetic resonance force microscopy, to quantum optomechanics. A notorious challenge in these…

Quantum Physics · Physics 2017-07-18 Yeghishe Tsaturyan , Andreas Barg , Eugene S. Polzik , Albert Schliesser

Silicon nitride (SiN) micro- and nanomechanical resonators have attracted a lot of attention in various research fields due to their exceptionally high quality factors ($Q$s). Despite their popularity, the origin of the limiting loss…

Mesoscale and Nanoscale Physics · Physics 2017-10-18 Luis Guillermo Villanueva , Silvan Schmid

Development of broadband thermal sensors for the detection of, among others, radiation, single nanoparticles, or single molecules is of great interest. In recent years, photothermal spectroscopy based on the shift of the resonance frequency…

The effects of pressure on micromechanical air-filled cavities made by a pair of suspended, parallel silicon nitride membranes are investigated in the free molecular and quasi-molecular regimes. Variations of the fundamental drummode…

Mesoscale and Nanoscale Physics · Physics 2017-12-06 Andreas Naesby , Sepideh Naserbakht , Aurélien Dantan

We show that torsion resonators can experience massive dissipation dilution due to nanoscale strain, and draw a connection to a century-old theory from the torsion balance community which suggests that a simple torsion ribbon is naturally…

Mesoscale and Nanoscale Physics · Physics 2021-12-16 Jon R. Pratt , Aman R. Agrawal , Charles A. Condos , Christian M. Pluchar , Stephan Schlamminger , Dalziel J. Wilson

On-chip actuation and readout of mechanical motion is key to characterize mechanical resonators and exploit them for new applications. We capacitively couple a silicon nitride membrane to an off resonant radio-frequency cavity formed by a…

Mesoscale and Nanoscale Physics · Physics 2020-07-21 A. N. Pearson , K. E. Khosla , M. Mergenthaler , G. A. D. Briggs , E. A. Laird , N. Ares

Polygon resonators are promising candidates for nanomechanical applications due to their compact architecture and high force sensitivity. Here, we develop an analytical framework to predict the resonance frequencies and dissipation dilution…

Optics · Physics 2026-02-24 Zhihao Niu , Yuanyuan Zhao

Controlling thermal energy transfer at the nanoscale has become critically important in many applications and thermal properties since it often limits device performance. In this work, we study the effects on thermal conductivity arising…

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