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We demonstrate high-performance nanowire superconducting single photon detectors (SSPDs) on ultrathin NbN films grown at a temperature compatible with monolithic integration. NbN films ranging from 150nm to 3nm in thickness were deposited…

Optics · Physics 2009-11-13 F. Marsili , D. Bitauld , A. Fiore , A. Gaggero , F. Mattioli , R. Leoni , M. Benkahoul , F. Levy

In this paper, we study the impact of using III-nitride semiconductors (GaN, AlN) as substrates for ultrathin (11 nm) superconducting films of NbTiN deposited by reactive magnetron sputtering. The resulting NbTiN layers are (111)-oriented,…

We prepare NbN thin films by DC magnetron sputtering on [100] GaAs substrates, optimise their quality and demonstrate their use for efficient single photon detection in the near-infrared. The interrelation between the Nb:N content, growth…

We demonstrate and characterize first superconducting nanowire single-photon detectors (SNSPDs) made from atomic layer-deposited (ALD) NbN layers. To assess the suitability of these films as a detector material, transport properties of bare…

Instrumentation and Detectors · Physics 2020-04-01 Emanuel Knehr , Artem Kuzmin , Mario Ziegler , Steffen Doerner , Konstantin Ilin , Michael Siegel , Ronny Stolz , Heidemarie Schmidt

High-quality ultra-thin films of niobium nitride (NbN) are developed by plasma-enhanced atomic layer deposition (PEALD) technique. Superconducting nanowire single-photon detectors (SNSPDs) patterned from this material exhibit high switching…

Applied Physics · Physics 2020-01-08 Risheng Cheng , Sihao Wang , Hong X. Tang

Niobium Titanium nitride (NbTiN) based superconducting nanowire single photon detectors (SNSPDs) are known for their high performance across a wide spectral range, from the X-ray to the mid-infrared. Nonetheless, fabrication challenges and…

Quantum Physics · Physics 2026-02-19 C. Klein , S. Cohen , T. Descamps , A. Iovan , P. Zolotov , P. Vennéguès , I. Florea , F. Semond , V. Zwiller

Superconducting nanowires used in single-photon detectors have been realized on amorphous or poly-crystalline films. Here, we report the use of single-crystalline NbN thin films for superconducting nanowire single-photon detectors (SNSPDs).…

Applied Physics · Physics 2020-10-28 Risheng Cheng , John Wright , Huili G. Xing , Debdeep Jena , Hong X. Tang

We report a milestone in achieving large-scale, ultrathin (~5 nm) superconducting NbN thin films on 300 mm Si wafers using a high-volume manufacturing (HVM) industrial physical vapor deposition (PVD) system. The NbN thin films possess…

Superconducting nanowire single-photon detectors (SNSPDs) have an absolute advantage over other types of single photon detectors except the low operating temperature. Therefore, many efforts have been devoted to find high-temperature…

Superconductivity · Physics 2018-01-17 Pusheng Yuan , Zhongtang Xu , Chen Li , Baogang Quan , Junjie Li , Changzhi Gu , Yanwei Ma

We experimentally investigated the detection performance of highly disordered NbxTi1-xN based superconducting nanowire single photon detectors (SNSPDs). The dependence on the composition of the transition temperature Tc for NbxTi1-xN films…

Superconductivity · Physics 2022-10-28 Ruoyan Ma , Rui Shu , Xingyu Zhang , Aobo Yu , Huang Jia , You Xiao , Huiqin Yu , Xiaoyu Liu , Hao Li , Per Eklund , Xiaofu Zhang , Lixing You

Niobium nitride (NbN) is a useful material for fabricating detectors because of its high critical temperature and relatively high kinetic inductance. In particular, NbN can be used to fabricate nanowire detectors and mm-wave transmission…

Instrumentation and Detectors · Physics 2020-02-03 Calder Sheagren , Peter Barry , Erik Shirokoff , Qing Yang Tang

This work investigates the effect of a scandium nitride buffer layer on the superconducting properties of niobium nitride thin films. The use of a ScN buffer layer significantly improves the characteristics of 29 nm thick NbN films: the…

Superconducting nanowire single-photon detector (SNSPD) with near-unity system efficiency is a key enabling, but still elusive technology for numerous quantum fundamental theory verifications and quantum information applications. The key…

Superconductivity · Physics 2020-12-30 Peng Hu , Hao Li , Lixing You , Heqing Wang , You Xiao , Jia Huang , Xiaoyan Yang , Weijun Zhang , Zhen Wang , Xiaoming Xie

The spectral detection efficiency and the dark count rate of superconducting nanowire single-photon detectors (SNSPD) has been studied systematically on detectors made from thin NbN films with different chemical compositions. Reduction of…

Superconductivity · Physics 2015-06-05 D. Henrich , S. Dörner , M. Hofherr , K. Il'in , A. Semenov , E. Heintze , M. Scheffler , M. Dressel , M. Siegel

We present the characteristics of superconducting nanowire single photon detectors (SNSPDs) fabricated from amorphous Mo0.75Ge0.25 thin-films. Fabricated devices show a saturation of the internal detection efficiency at temperatures below 1…

Superconductivity · Physics 2015-06-18 V. B. Verma , A. E. Lita , M. R. Vissers , F. Marsili , D. P. Pappas , R. P. Mirin , S. W. Nam

Niobium Nitride (NbN) nanowire is the most popular detection material of superconducting nanowire single photon detectors (SNSPDs) for high repetition rate and high efficiency. However, it has been assumed to be difficult for fabricating…

Applied Physics · Physics 2018-11-27 Qi Chen , Biao Zhang , Labao Zhang , Rui Ge , Ruiying Xu , Yang Wu , Xuecou Tu , Xiaoqing Jia , Lin Kang , Jian Chen , Peiheng Wu

Nowadays ultrahigh performance superconducting nanowire single-photon detectors are the key elements in a variety of devices from biological research to quantum communications and computing. Accurate tuning of superconducting material…

Dark count rate is one of the key parameters limiting the performance of the superconducting nanowire single photon detector (SNSPD). We have designed a multi-layer film bandpass filter that can be integrated onto the SNSPD to suppress the…

Superconductivity · Physics 2014-06-27 Xiaoyan Yang , Hao Li , Weijun Zhang , Lixing You , Lu Zhang , Xiaoyu Liu , Zhen Wang , Wei Peng , Xiaoming Xie , Mianheng Jiang

We investigate the performance of superconducting nanowire photon detectors fabricated from ultra-thin Nb. A direct comparison is made between these detectors and similar nanowire detectors fabricated from NbN. We find that Nb detectors are…

Superconducting nanowire single-photon detectors (SNSPDs) perform single-photon counting with exceptional sensitivity and time resolution at near-infrared wavelengths. State-of-the-art SNSPDs, based on 100 nm-wide, 4 to 5 nm thick NbN…

Quantum Physics · Physics 2015-05-20 F. Marsili , F. Najafi , E. Dauler , F. Bellei , X. Hu , M. C. Csete , R. Molnar , K. K. Berggren
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