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The Nitrogen Vacancy color center (NV-) in diamond is of great interest for novel photonic applications. Diamond nano-photonic structures are often implemented using Focused-Ion-Beam (FIB) processing, leaving a damaged surface which has a…

We present the design and fabrication of nanobeam photonic crystal cavities in single crystal diamond for applications in cavity quantum electrodynamics. First, we describe three-dimensional finite-difference time-domain simulations of a…

Quantum Physics · Physics 2015-05-19 T. M. Babinec , J. T. Choy , K. J. M. Smith , M. Khan , M. Loncar

The formation of single-crystal diamond membranes is an important prerequisite for the fabrication of high-quality optical cavities in this material. Diamond membranes fabricated using lift-off processes involving the creation of a damaged…

We describe a technique for fabricating micro- and nano-structures incorporating fluorescent defects in diamond with a positional accuracy in the hundreds of nanometers. Using confocal fluorescence microscopy and focused ion beam (FIB)…

We present experimental results and numerical simulations to investigate the modification of structural-mechanical properties of ion-implanted single-crystal diamond. A phenomenological model is used to derive an analytical expression for…

Materials Science · Physics 2016-08-26 F. Bosia , N. Argiolas , M. Bazzan , P. Olivero , F. Picollo , A. Sordini , M. Vannoni , E. Vittone

This paper presents experimental data and analysis of the structural damage caused by swift-heavy ion irradiation of single-crystal diamond. The patterned buried structural damage is shown to generate, via swelling, a mirror-pattern on the…

The creation of nitrogen-vacancy centres in diamond is nowadays well controlled using nitrogen implantation and annealing. Although the high-resolution placement of NV centres has been demonstrated using either collimation through pierced…

Diamonds offer unique benefits for optical technology development due to their optical, chemical, electrical, mechanical, and thermal properties. These attributes also contribute to their aesthetic appeal, high commercial value, and utility…

We demonstrate the feasibility of fabricating light-waveguiding microstructures in bulk single-crystal diamond by means of direct ion implantation with a scanning microbeam, resulting in the modulation of the refractive index of the…

Optics · Physics 2016-08-29 S. Lagomarsino , P. Olivero , F. Bosia , M. Vannoni , S. Calusi , L. Giuntini , M. Massi

We report on the systematic characterization of conductive micro-channels fabricated in single-crystal diamond with direct ion microbeam writing. Focused high-energy (~MeV) helium ions are employed to selectively convert diamond with…

Materials Science · Physics 2014-05-06 F. Picollo , D. Gatto Monticone , P. Olivero , B. A. Fairchild , S. Rubanov , S. Prawer , E. Vittone

This paper reports on the fabrication and characterization of a high purity monocrystalline diamond detector with buried electrodes realized by the selective damage induced by a focused 6 MeV carbon ion beam scanned over a pattern defined…

Instrumentation and Detectors · Physics 2016-08-30 P. Olivero , J. Forneris , M. Jaksic , Z. Pastuovic , F. Picollo , N. Skukan , E. Vittone

In the present work we report about a parallel-processing ion beam fabrication technique whereby high-density sub-superficial graphitic microstructures can be created in diamond. Ion beam implantation is an effective tool for the structural…

Due to their outstanding mechanical properties, diamond and diamond-like materials find significant technological applications ranging from well-established industrial fields (cutting tools, coatings, etc.) to more advanced mechanical…

The development of solid-state photonic quantum technologies is of great interest for fundamental studies of light-matter interactions and quantum information science. Diamond has turned out to be an attractive material for integrated…

The focused ion beam (FIB) microscope is well established as a high-resolution machining instrument capable of site-selectively removing material down to the nanoscale. Beyond subtractive processing, however, the FIB can also add material…

Materials Science · Physics 2025-10-07 Frances Isabel Allen

The fabrication method of diamond nanostructures can be divided into two categories: top-down etching and bottom-growth. The early work on 3D micro-structured diamond dates back to mid-1990s, using chemical vapor infiltration (CVI)…

Applied Physics · Physics 2020-05-11 Fang Gao , Christoph E. Nebel

Focussed Ion Beam (FIB) milling is a mainstay of nano-scale machining. By manipulating a tightly focussed beam of energetic ions, often gallium (Ga+), FIB can sculpt nanostructures via localised sputtering. This ability to cut solid matter…

We report on a novel method for the fabrication of three-dimensional buried graphitic micropaths in single crystal diamond with the employment of focused MeV ions. The use of implantation masks with graded thickness at the sub-micrometer…

Micro- and nanothermometry enable precise temperature monitoring and control at the micro- and nanoscale, and have become essential diagnostic tools in applications ranging from high-power microelectronics to biosensing and nanomedicine.…

Materials Science · Physics 2025-10-28 Md Shakhawath Hossain , Dylan G. Stone , G. Landry , Xiaoxue Xu , Carlo Bradac , Toan Trong Tran

Fiber-integrated micro-optical elements promise a scalable approach to photon collection and beam shaping for quantum information processing. Here, we demonstrate single-step fabrication of micro-spherical, micro-spiral, and micro-axicon…

Optics · Physics 2026-04-21 Raman Kumar , Sebastian Will
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