Related papers: Imaging Scatterometry
We propose a tomographic method to reconstruct the optical properties of a highly-scattering medium from incoherent acousto-optic measurements. The method is based on the solution to an inverse problem for the diffusion equation and makes…
The recent theory of compressive sensing leverages upon the structure of signals to acquire them with much fewer measurements than was previously thought necessary, and certainly well below the traditional Nyquist-Shannon sampling rate.…
Ghost imaging allows image reconstruction by correlation measurements between a light beam that interacts with the object without spatial resolution and a spatially resolved light beam that never interacts with the object. The two light…
This study explores the use of synchrotron measurements as a nanometrology tool for blazed gratings. In grazing incidence geometry, one can measure both the conical diffraction and the diffuse scattering on the grating simultaneously in a…
We construct a set of shape-finders which determine shapes of compact surfaces (iso-density surfaces in galaxy surveys or N-body simulations) without fitting them to ellipsoidal configurations as done earlier. The new indicators arise from…
We present a novel method for characterizing the microstructure of a material from volumetric datasets such as 3D image data from computed tomography (CT). The method is based on a new statistical model for the distribution of voxel…
Small angle X-ray scattering (SAXS) was used to quantitatively study the morphology of aligned, mono-disperse conical etched ion tracks in thin films of amorphous silicon dioxide with aspect ratios of around 6:1, and in polycarbonate foils…
Structured light 3D surface imaging is a school of techniques in which structured light patterns are used for measuring the depth map of the object. Among all the designed structured light patterns, phase pattern has become most popular…
We propose a sampling type method to image scatterer in an electromagnetic waveguide. The waveguide terminates at one end and the measurements are on the other end and in the far field. The imaging function is based on integrating the…
We propose a method for optical nano-imaging in which the structure of a three-dimensional inhomogeneous medium may be recovered from far-field power measurements. Neither phase control of the illuminating field nor phase measurements of…
This paper is concerned with the inverse problem of determining the shape of penetrable periodic scatterers from scattered field data. We propose a sampling method with a novel indicator function for solving this inverse problem. This…
Strain and defects in crystalline materials are responsible for the distinct mechanical, electric and magnetic properties of a desired material, making their study an essential task in material characterization, fabrication and design.…
Understanding the extent of contact between objects is crucial for surface-driven phenomena in the natural world. While interactions are known to occur at subnanometer-length scales, the techniques needed to measure such small-length scales…
We demonstrate a different scheme to perform optical sectioning of a sample based on the concept of induced coherence [Zou et al., Phys. Rev. Lett. 67, 318 (1991)]. This can be viewed as a different type of optical coherence tomography…
We present an efficient machine learning framework for detection and classification of nanoparticles on surfaces that are detected in the far-field with Coherent Fourier Scatterometry (CFS). We study silicon wafers contaminated with…
We investigate the potential of mutual scattering, i.e., light scattering with multiple properly phased incident beams, as a method to extract structural information from inside an opaque object. In particular, we study how sensitively the…
Methodologies for characterization of the lateral indentation of silicon-germanium (SiGe) nanosheets using different non-destructive and in-line compatible metrology techniques are presented and discussed. Gate-all-around nanosheet device…
Speckle patterns are a powerful tool for high-precision metrology, as they allow remarkable performance in relatively simple setups. Nonetheless, researchers in this field follow rather distinct paths due to underappreciated general…
Nano-optic imagers that modulate light at sub-wavelength scales could unlock unprecedented applications in diverse domains ranging from robotics to medicine. Although metasurface optics offer a path to such ultra-small imagers, existing…
Inverse scattering is the process of estimating the spatial distribution of the scattering potential of an object by measuring the scattered wavefields around it. In this paper, we consider reflection tomography of high contrast objects…