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Auger analysis of high-aspect ratio contact holes of integrated microelectronic devices is a challenging analytical task. Due to geometrical shadowing the primary electron beam and the energy analyser have not the required direct line of…

Materials Science · Physics 2015-05-19 Uwe Scheithauer

A none conventional approach for depth profiling of thin film systems with enhanced depth resolution has been developed using standard Auger microprobe instruments. For the preparation of an in situ low angle cross-section, the sample is…

Materials Science · Physics 2015-02-18 Uwe Scheithauer

A new experimental equipment allowing to study the sputtering induced by ion beam irradiation is presented. The sputtered particles are collected on a catcher which is analyzed in situ by Auger electron spectroscopy without breaking the…

Instrumentation and Detectors · Physics 2013-06-06 P. Salou , H. Lebius , A. Benyagoub , T. Langlinay , D. Lelièvre , B. Ban-d'Etat

We describe a self calibrating optical technique that allows to perform absolute measurements of scattering cross sections for the light scattered at extremely small angles. Very good performances are obtained by using a very simple optical…

Optics · Physics 2009-11-10 Doriano Brogioli , Alberto Vailati , Marzio Giglio

Several, recently proposed methods of surface manufacturing based on ion beam sputtering, which involve dual beam setups, sequential application of ion beams from different directions, or sample rotation, are studied with the method of…

Mesoscale and Nanoscale Physics · Physics 2023-01-05 Taha Yasseri , Reiner Kree

Inverse Compton Scattering at shallow angles can be used to tune the spectrum and increase the brightness of the emitted radiation. Here, we report on the demonstration of emission of visible light by a 4.7 MeV $e$-beam crossing a 780 nm…

Accelerator Physics · Physics 2025-09-08 B. H. Schaap , M. Lenz , P. Musumeci

Ion sputtering from loose powders remains poorly understood despite its relevance to planetary science and industry. We developed a multiscale Monte Carlo model to simulate sputtering from powders, using a higher-fidelity approach for the…

In this paper evolution of silicon surface topography, under low energy ion bombardment, is investigated at higher oblique incident angles in the range of 63\degree-83\degree. Si(100) substrates were exposed to 500 eV argon ions. Different…

Mesoscale and Nanoscale Physics · Physics 2015-06-04 Tanmoy Basu , Jyoti Ranjan Mohanty , T. Som

The creep behaviour and microstructural evolution of a Sn-3Ag-0.5Cu wt.% sample with a columnar microstructure have been investigated through in-situ creep testing under constant stress of 30 MPa at 298 K. This is important, as 298 K is…

Materials Science · Physics 2020-06-11 Tianhong Gu , Vivian Tong , Christopher M. Gourlay , T. Ben Britton

Depth profiling of thin films by inert gas sputtering is one of the most important applications of Auger electron spectroscopy and X-ray photoelectron spectroscopy. Such an analysis monitors the elemental in-depth composition of the thin…

Materials Science · Physics 2021-01-05 Uwe Scheithauer

The production of photons at very small angles with respect to the proton beam direction is studied in deep-inelastic positron-proton scattering at HERA. The data are taken with the H1 detector in the years 2006 and 2007 and correspond to…

High Energy Physics - Experiment · Physics 2015-05-28 H1 Collaboration

Inverse scattering methods capable of compressive imaging are proposed and analyzed. The methods employ randomly and repeatedly (multiple-shot) the single-input-single-output (SISO) measurements in which the probe frequencies, the incident…

Data Analysis, Statistics and Probability · Physics 2015-05-14 Albert C. Fannjiang

Scattering experiments can be leveraged to extract the effective properties of a heterogeneous metamaterial slab based on multi-point measurements in surrounding media. In this technique, two measurements are made in the ambient media on…

Applied Physics · Physics 2023-07-14 Joshua Morris , Alireza V. Amirkhizi

Impact collision ion scattering spectroscopy (ICISS), which is a variation of low energy ion scattering (LEIS) that employs large scattering angles, is performed on Bi2Se3 surfaces prepared by ion bombardment and annealing (IBA). ICISS…

Materials Science · Physics 2017-07-24 Weimin Zhou , Haoshan Zhu , Jory A. Yarmoff

Micropatterned surfaces composed of concentric circular defects having a smooth trench-like profile are formed using a photoresist (SU-8). When an evaporating droplet encounters the micropatterned surface an evaporation phase is observed…

Fluid Dynamics · Physics 2011-09-29 Damien Debuisson , Vincent Senez , Steve Arscott

Topography of silicon surfaces irradiated by a 2 MeV Si$^+$ ion beam at normal incidence and ion fluences in the range $10^{15}-10^{16}$ ions/cm$^{2}$ has been investigated using scanning tunneling microscopy. At length scales below…

Materials Science · Physics 2009-11-07 D. K. Goswami , B. N. Dev

Workflows have been developed in the past decade to enable atom probe tomography analysis at cryogenic temperatures. The inability to control the local deposition of the metallic precursor from the gas-injection system (GIS) at cryogenic…

Materials Science · Physics 2023-06-21 James O. Douglas , Michele Conroy , Finn Giuliani , Baptiste Gault

We report formation of self organized InP nano dots using 3 keV Ar+ ion sputtering, at $15^\circ$ incidence from surface normal, on InP(111) surface. Morphology and optical properties of the sputtered surface, as a function of sputtering…

Materials Science · Physics 2007-08-22 D. Paramanik , S. Majumdar , S. R. Sahoo , S. N. Sahu , S. Varma

Topography evolution of Si(100) surface due to oblique incidence low energy ion beam sputtering (IBS) is investigated. Experiments were carried out at different elevated temperatures from 20$^{\circ}$C to 450$^{\circ}$C and at each…

Materials Science · Physics 2016-04-08 Debasree Chowdhury , Biswarup Satpati , Debabrata Ghose

Small angle X-ray scattering (SAXS) was used to quantitatively study the morphology of aligned, mono-disperse conical etched ion tracks in thin films of amorphous silicon dioxide with aspect ratios of around 6:1, and in polycarbonate foils…

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