Related papers: Self-bias Dependence on Process Parameters in Asym…
This paper presents the plasma potential distribution across magnetic field lines in an argon/oxygen plasma created by 13.56 MHz CCRF discharge consisting of a pair of ring electrodes. It is found that the radial plasma density, electron…
Three-dimensional (3D) etching of materials by plasmas is an ultimate challenge in microstructuring applications. A method is proposed to reach a controllable 3D structure by using masks in front of the surface in a plasma etch reactor in…
The Floating Potential Fluctuations (FPF) observed in a dc glow discharge plasma powered with two sources is modeled using an anharmonic oscillator with two forcing terms. In the discharge system, one of the electrode is biased to a…
Discharge structure refers to the morphology of different plasma quantities, such as electron temperature, reaction rate, plasma potential, mass flux, net charge and species density, which are determined by plasma transport mechanism and…
Electron emission from the boundary is ubiquitous in capacitively coupled plasma (CCP) and precipitates nonnegligible influences on the discharge properties. Here we present the PIC-MCC simulation of an Ohmic-dominant heating mode of…
In steady-state, the plasma loss rate to the chamber wall is balanced by the ionization rate in the hot-filament discharges. This balance in the loss rate and ionization rate maintains the quasi--neutrality of the bulk plasma. In this…
Capacitively coupled radio-frequency (CCRF) CF_4 plasmas have been found to exhibit a self-organized striated structure at operating conditions, where the plasma is strongly electronegative and the ion-ion plasma in the bulk region (largely…
The magnetic-field behaviour of the off-diagonal impedance in Co-based amorphous wires is investigated under the condition of sinusoidal (50 MHz) and pulsed (5 ns rising time) current excitations. For comparison, the field characteristics…
Very large DC and AC electric fields cannot be sustained between conducting electrodes because of volume gas breakdown and/or surface field emission. However, very large potential fields are now routinely generated in plasma structures such…
We report the existence of an enhanced operating regime for a high-frequency, low-pressure capacitively coupled plasma (CCP) discharge in the presence of a weak magnetic field applied parallel to the electrodes. Our PIC-MCC simulations show…
An experiment for studying laser self-guiding has been carried out for the high power ultrashort pulse laser interaction with an underdense plasma slab. Formation of an extremely long plasma channel and its bending are observed when the…
Due to the complicated environment of the plasma sheath, it is difficult to experimentally measure plasma characteristics in the narrow geometry where sheaths from opposite boundaries overlap. Since such geometries are often found in…
We measure the rectified dc currents resulting when a 3-terminal semiconductor device with gate-dependent conductance is driven with an ac gate voltage. The rectified currents exhibit surprisingly complex behaviour as the dc source-drain…
Thin films of hydrogenated amorphous carbon (a-C:H) deposited by radio frequency plasma-enhanced chemical vapour deposition (rf-PECVD) have been studied for various applications. An interesting property of these films is their high…
Unipolar light pulses with a non-zero electric area due to the unidirectional action on charged particles can be used for the ultrafast control of the properties of quantum systems. To control atomic properties in an efficient way, it is…
We demonstrate how exactly bound cavity modes can be realized in dielectric structures other than 3d photonic crystals. For a microcavity consisting of crossed anisotropic layers, we derive the cavity resonance frequencies, and spontaneous…
We propose a superconducting diode device comprising a central superconducting film flanked by two wires carrying an applied DC bias, suitably chosen so as to generate different asymmetric field profiles. Through numerical simulations of…
Under strong electric fields, an arc of strong current flowing through plasma can link two metal surfaces even in ultra high vacuum. Despite decades of research, the chain of events leading to vacuum arc breakdowns is hitherto unknown.…
Electron beam (e-beam) generated plasmas with applied crossed electric and magnetic $\left(\mathbf{E} \times \mathbf{B}\right)$ fields are promising for low damage processing of materials with applications to microelectronics and quantum…
Three-dimensional microwave waveguide cavities are essential tools for many cavity quantum electrodynamics experiments. However, the need to control quantum emitters with dc magnetic fields inside the cavity often limits such experiments to…