Related papers: Plasma Processing of Large Curved Surfaces for SRF…
The understanding of the Ar/Cl2 plasma etching mechanism is crucial for the desired modification of inner surface of the three dimensional niobium (Nb) superconductive radio frequency cavities. Uniform mass removal in cylindrical shaped…
An apparatus and a method are described for plasma etching of the inner surface of superconducting radio frequency (SRF) cavities. Accelerator SRF cavities are formed into a variable-diameter cylindrical structure made of bulk niobium, for…
Plasma etching has a potential to be an alternative processing technology for superconducting radio frequency (SRF) cavities. An apparatus and a method are developed for plasma etching of the inner surfaces of SRF cavities. To test the…
Nitrogen doping treatment with the subsequent electropolishing (EP) of the niobium superconducting cavity can significantly increase the cavity's quality factor up to a factor of 3. But the process of the EP removal may reintroduce hydrogen…
The main goal of this research was to determine the key reagents during the highly Si3N4/SiO2 selective etching. The experiments were conducted, where both Si3N4 and SiO2 samples were etched by NF3/O2 and NF3/O2/N2/H2 plasmas. The sources…
In-situ plasma processing of superconducting radio frequency (SRF) cavities is a performance recovery technique used to mitigate the field emission limiting phenomenon. It has been proved very effective at major particle accelerator…
The PIP II linear accelerator includes different types of niobium SRF cavities including 650 MHz elliptical low (0.61) and high (0.92) beta cavities. The elliptical cavity surface is processed with the electropolishing method. The…
Electropolishing (EP) of 1.3 GHz niobium superconducting RF cavities is conducted to achieve a desired smooth and contaminant-free surface that yields good RF performance. Achieving a smooth surface of a large-sized elliptical cavity with…
Plasma processing of superconducting radio frequency (SRF) cavities has shown an improvement in accelerating gradient by reducing the radiation due to field emission and multipacting. Plasma processing is a common technique where the free…
An rf coaxial capacitively coupled Ar/Cl2 plasma is applied to processing the inner wall of superconducting radio frequency cavities. A dc self-bias potential is established across the inner electrode sheath due to the surface area…
Plasma etching, a critical process in semiconductor fabrication, utilizes hydrofluorocarbons both as etchants and as precursors for carbon film formation, where precise control over film growth is essential for achieving high…
Field emission (FE) is one of the main limiting factors of superconducting radio-frequency (SRF) cavities operating in accelerators and it occurs whenever contaminants, like dust, metal flakes or even absorbates, are present on the surface…
Jefferson Lab began a plasma processing program start-ing in the spring of 2019. Plasma processing is a common technique for removing hydrocarbons from surfaces, which increases the work function and reduces the sec-ondary emission…
The reduction of the asymmetry in the plasma sheath voltages of a cylindrical coaxial capacitively coupled plasma is crucial for efficient surface modification of the inner surfaces of concave three-dimensional structures, including…
Metal surface cleaning or etching techniques using reactive plasma are emerging as one of the dry processing techniques for surface contaminants with high bond energy, especially for cleaning and decontamination of nuclear components and…
Plasma processing of superconducting radio frequency (SRF) cavities has been an active research effort at Jefferson Lab (JLab) since 2019, aimed at enhancing cavity performance by removing hydrocarbon contaminants and reducing field…
Electropolishing is the premier surface preparation method for high-Q, high-gradient superconducting RF cavities made of Nb. This leaves behind an apparently smooth surface, yet the achievable peak magnetic fields fall well below the…
Field emission is one of the factors that can limit the performance of superconducting radio frequency cavities. In order to reduce possible field emission in LCLS-II (Linac Coherent Light Source II), we are developing plasma processing for…
Niobium nitride (NbN) is a metallic superconductor that is widely used for superconducting electronics due to its high transition temperature ($T_c$) and kinetic inductance. Processing-induced damage negatively affects the performance of…
A new surface treatment technique for niobium (Nb) Superconducting Radio Frequency (SRF) cavities called Buffered Electropolishing (BEP) has been developed at JLab. It was found that BEP could produce the smoothest surface finish on Nb…