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Microscopy with extreme ultraviolet (EUV) radiation holds promise for high-resolution imaging with excellent material contrast, due to the short wavelength and numerous element-specific absorption edges available in this spectral range. At…

We demonstrate high resolution extreme ultraviolet (EUV) coherent diffractive imaging in the most general reflection geometry by combining ptychography with tilted plane correction. This method makes it possible to image extended surfaces…

We demonstrate a new scheme of spectromicroscopy in the extreme ultraviolet (EUV) spectral range, where the spectral response of the sample at different wavelengths is imaged simultaneously. It is enabled by applying ptychographical…

The SPEAR (or 'FIMS') instrumentation has been used to conduct the first large-scale spectral mapping of diffuse cosmic far ultraviolet (FUV, 900-1750 AA) emission, including important diagnostics of interstellar hot (10^4 K - 10^6 K) and…

Table-top extreme ultraviolet (EUV) microscopy offers unique opportunities for label-free investigation of biological samples. Here, we demonstrate ptychographic EUV imaging of two dried, unstained model specimens: germlings of a fungus…

Laser speckle, the granular intensity pattern arising from random optical interference, provides a high-dimensional encoding of spectral information that can be exploited for precision metrology. Speckle-based spectrometers have advanced…

The Far Ultraviolet Spectroscopic Explorer satellite observes light in the far-ultraviolet spectral region, 905 - 1187 A with high spectral resolution. The instrument consists of four coaligned prime-focus telescopes and Rowland…

Astrophysics · Physics 2009-10-31 H. W. Moos

The remarkable precision of frequency comb (FC) lasers is transferred to the extreme ultraviolet (XUV, wavelengths shorter than 100 nm), a frequency region previously not accessable to these devices. A frequency comb at XUV wavelengths near…

A prototype cross-dispersed optical echelle spectrograph of very high resolution has been designed and built at Steward Observatory and tested at the Starfire Optical Range (SOR) 1.5 m telescope. It is the first spectrograph to take…

Astrophysics · Physics 2009-11-07 Jian Ge , J. R. P. Angel , B. Jacobsen , N. Woolf , R. Q. Fugate , J. H. Black

A custom, flat field, extreme ultraviolet EUV spectrometer built specifically for use with low power light sources that operate under ultrahigh vacuum conditions is reported. The spectral range of the spectrometer extends from 4 nm to 40…

High harmonic generation is a convenient way to obtain extreme ultraviolet light from table-top laser systems and the experimental tools to exploit this simple and powerful light source for time-resolved spectroscopy are being developed by…

Atomic and Molecular Clusters · Physics 2013-12-20 Jakob Grilj , Emily Sistrunk , Markus Koch , Markus Gühr

Extreme ultraviolet (XUV) lasers are essential for the investigation of fundamental physics. Especially high repetition rate, high photon flux sources are of major interest for reducing acquisition times and improving signal to noise ratios…

Many atomic and molecular systems of fundamental interest possess resonance frequencies in the extreme ultraviolet (XUV) where laser technology is limited and radiation sources have traditionally lacked long-term phase coherence. Recent…

After decades of supremacy of the Titanium:Sapphire technology, Ytterbium-based high-order harmonic sources are emerging as an interesting alternative for experiments requiring high flux of ultrashort extreme ultraviolet (XUV) radiation. In…

Extreme ultraviolet (EUV) lithography is the leading lithography technique in CMOS mass production, moving towards the sub-10 nm half-pitch (HP) regime with the ongoing development of the next generation high-numerical aperture (high-NA)…

A step towards a successful implementation of timeresolved digital in-line holography with extreme ultraviolet radiation is presented. Ultrashort XUV pulses are produced as high-order harmonics of a femtosecond laser and a Schwarzschild…

We discuss a concept of a point-like source of the extreme ultraviolet (EUV) light based on a non-equilibrium microwave discharge in expanding jet of dense xenon plasma with multiply charged ions. A conversion efficiency of microwave…

Plasma Physics · Physics 2018-10-03 I. S. Abramov , E. D. Gospodchikov , A. G. Shalashov

High harmonic generation (HHG) enables extreme ultraviolet radiation with table-top setups. Its exceptional properties, such as coherence and (sub)-femtosecond pulse durations, have led to a diversity of applications. Some of these require…

Extreme ultraviolet (EUV) scatterometry is an increasingly important metrology that can measure critical parameters of periodic nanostructured materials in a fast, accurate, and repeatable manner and with high sensitivity to nanoscale…

We characterize the properties of extreme ultraviolet (EUV) light source plasmas driven by laser wavelengths in the $\lambda_{\mathrm{laser}} = 1.064 - 10.6 $ $\mu$m range. Detailed numerical simulations of laser-irradiated spherical tin…

Plasma Physics · Physics 2023-04-05 D. J. Hemminga , O. O. Versolato , J. Sheil
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