Related papers: Addressing geometric non-linearities with cantilev…
The requirements pertaining to the reliability and accuracy of micro-electromechanical gyroscopic sensors are increasing,as systems for vehicle localization emerge as an enabling factor for autonomous driving. Since micro-electromechanical…
Nonlinear elastic effects play an important role in the dynamics of microelectromechanical systems (MEMS). Duffing oscillator is widely used as an archetypical model of mechanical resonators with nonlinear elastic behavior. In contrast,…
We present mechanical measurements performed at low temperatures on cantilever-based microelectro-mechanicalstructures(MEMS) coated with a metallic layer. Two very different coatings are presented in order to illustrate the capabilities of…
Well-posedness of a free boundary problem for electrostatic microelectromechanical systems (MEMS) is investigated when nonlinear bending effects are taken into account. The model describes the evolution of the deflection of an electrically…
An extremely sensitive temperature measurement MEMS device is developed based on the principle of structural deflection in a bi-material cantilever caused by a difference in thermal expansion coefficients. A dual-beam asymmetrical geometry…
We apply the well-established theoretical method developed for geometrical nonlinearities of micro/nano-mechanical clamped beams to circular drums. The calculation is performed under the same hypotheses, the extra difficulty being to…
This paper is a computational bifurcation analysis of a non-linear partial differential equation (PDE) characterizing equilibrium configurations in Micro electromechanical Systems (MEMS). MEMS are engineering systems that utilize…
Non-linearities play an important role in micro- and nano- electromechanical system (MEMS and NEMS) design. In common electrostatic and magnetic actuators, the forces and voltages can depend in a non-linear way on position, charge, current…
An idealized electrostatically actuated microelectromechanical system (MEMS) involving an elastic plate with a heterogeneous dielectric material is considered. Starting from the electrostatic and mechanical energies, the governing evolution…
This work presents the mathematical modeling and numerical investigation of a thermo-controlled Micro-Electro-Mechanical System (MEMS) obtained by coupling an HP memristor with mechanical and electrical resonators. Using the linear drift HP…
Silicon-based micro-electromechanical systems (MEMS) can be fabricated using bulk and surface micromachining technology. A micro mirror designed as an oscillatory MEMS constitutes a prominent example. Typically, in order to minimize energy…
: It goes without saying that at present MEMS Technology became one of the latest and emerging methods because of its miniaturization and effective cost. Now near the beginning recognition of disease became a major challenge in front of…
Nonlinear micro-electro-mechanical systems (MEMS) resonators open new opportunities in sensing and signal manipulation compared to their linear counterparts by enabling frequency tuning and increased bandwidth. Here, we design, fabricate…
We present a novel mode of operation for Duffing-type nonlinear microelectromechanical (MEMS) devices whereby a self-sustained multi-frequency output is generated. This new librator regime creates a limit cycle around a dynamical fixed…
A variational approach is employed to find stationary solutions to a free boundary problem modeling an idealized electrostatically actuated MEMS device made of an elastic plate coated with a thin dielectric film and suspended above a rigid…
The dynamics of a free boundary problem for electrostatically actuated microelectromechanical systems (MEMS) is investigated. The model couples the electric potential to the deformation of the membrane, the deflection of the membrane being…
The evolution problem for a membrane based model of an electrostatically actuated microelectromechanical system (MEMS) is studied. The model describes the dynamics of the membrane displacement and the electric potential. The latter is a…
This paper concerns the experimental validation of some mathematical models previously developed by the authors, to predict the static behaviour of microelectrostatic actuators, basically free-clamped microbeams. This layout is currently…
In canonical models of Micro-Electro Mechanical Systems (MEMS), an event called touch- down whereby the electrical components of the device come into contact, is characterized by a blow up in the governing equations and a non-physical…
Sensors and actuators based on resonant micro-electro-mechanical systems (MEMS), such as scanning micro mirrors, are well-established in automotive and consumer products. As the areas of application broaden, the requirements for the MEMS…