Related papers: Improved surface quality of anisotropically etched…
Gold micro-mirrors have been formed in silicon in an inverted pyramidal shape. The pyramidal structures are created in the (100) surface of a silicon wafer by anisotropic etching in potassium hydroxide. High quality micro-mirrors are then…
The next generation of gravitational-wave detectors, such as the Einstein Telescope, is designed to reduce noise in a wide band of frequencies compared to the current generation, through the use of new technologies. ETpathfinder, designed…
The emergence of planar meta-lenses on flexible materials has profoundly impacted the long-standing perception of diffractive optics. Despite their advantages, these lenses still face challenges in design and fabrication to obtain high…
Miniature concave hollows, made by wet etching silicon through a circular mask, can be used as mirror substrates for building optical micro-cavities on a chip. In this paper we investigate how ICP polishing improves both shape and roughness…
Optical resonators are increasingly important tools in science and technology. Their applications range from laser physics, atomic clocks, molecular spectroscopy, and single-photon generation to the detection, trapping and cooling of atoms…
We describe a new technology for the fabrication of inexpensive high-quality mirrors. We begin by chemically producing a large number of metallic nanoparticles coated with organic ligands. The particles are then spread on a liquid substrate…
Although high-resistivity, low-loss silicon is an excellent material for THz transmission optics, its high refractive index necessitates antireflection treatment. We fabricated a wide-bandwidth, two-layer antireflection treatment by cutting…
Concave pyramids are created in the (100) surface of a silicon wafer by anisotropic etching in potassium hydroxide. High quality micro-mirrors are then formed by sputtering gold onto the smooth silicon (111) faces of the pyramids. These…
A new method of introducing nanopores with spongy morphology during fabrication of size and pitch controlled flexible silicon microwires (SiMWs) in wafer scale is presented using nanosphere lithography technique in addition to metal…
The reliability of perovskite material LSCF to be used as cathode parts in solid oxide fuel cells also relies on its mechanical properties. Adequate surface conditions are desired when the as-sintered porous thin films are subjected to…
We present the novel design of microfabricated, silicon-substrate based mirrors for use in cryogenic Fabry-Perot Interferometers (FPIs) for the mid-IR to sub-mm/mm wavelength regime. One side of the silicon substrate will have a…
Modern grating manufacturing techniques suffer from inherent issues that limit their peak efficiencies. The anisotropic etching of silicon facilitates the creation of custom gratings that have sharp and atomically smooth facets, directly…
This paper presents a new research study on the platform fabrication of fluorescence bio-detection chip with an optical fiber transmission. Anisotropic wet etching on (100) silicon wafers to fabrication V-groove for optical fiber alignment…
Ferroelectric materials exhibit interesting electric, mechanical and optical properties. Particularly,tin-film lead zirconium titanate (PZT) has been used as a standard piezo-electric material in micro-electro-mechanical systems.…
The miniaturization of current image sensors is largely limited by the volume of the optical elements. Using a sub-wavelength patterned quasi-periodic structure, also known as a metasurface, one can build planar optical elements based on…
Silicon on insulator photonics has offered a versatile platform for the recent development of integrated optomechanical circuits. However, there are some constraints such as the high cost of the wafers and limitation to a single physical…
Using large-scale molecular dynamics simulations, we investigate the surface properties of lithium, sodium, and potassium silicate glasses containing 25 mole % of alkali oxide. The comparison of two types of surfaces, a melt-formed surface…
The performance of mirrors in optical interferometers is critically influenced by their surface quality. Accurate metrology enables mirror surfaces to be characterized through phase maps describing their three-dimensional structure after…
We present an optical nanotrapping setup that exhibits enhanced efficiency, based on localized plasmonic fields around sharp metallic features. The substrates consist of laser-structured silicon wafers with quasi-ordered microspikes on the…
Epsilon-near-zero (ENZ) materials, including artificial metamaterials, have been advanced to mold laser beams and antenna-mediated radiated waves. Here we propose an efficient method to control Ohmic losses inherent to natural ENZ materials…