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We demonstrate the operation of superconducting coplanar microwave resonators in a very large frequency range up to 50 GHz. The resonators are fabricated from niobium thin films on sapphire substrates and optimized for these high…

Characterizing superconducting microwave resonators with highly dissipative elements is a technical challenge, but a requirement for implementing and understanding the operation of hybrid quantum devices involving dissipative elements, e.g.…

We design and fabricate two types of superconducting niobium coplanar waveguide microwave resonators with different coupling capacitors on high purity Si substrates. Their microwave transmissions are measured at the temperatures of 20 mK.…

We have studied superconducting coplanar-waveguide (CPW) resonators fabricated from disordered (granular) films of Aluminum. Very high kinetic inductance of these films, inherent to disordered materials, allows us to implement ultra-short…

Superconductivity · Physics 2019-01-16 Wenyuan Zhang , K. Kalashnikov , Wen-Sen Lu , P. Kamenov , T. DiNapoli , M. E. Gershenson

Superconducting coplanar waveguide (SCPW) resonators with high internal quality factors (\Q_i) are essential for quantum information applications, but suffer severe Qi degradation under magnetic fields due to quasiparticle generation and…

Superconductivity · Physics 2025-09-26 Bongkeon Kim , Chang Geun Yu , Priyanath Mal , Yong-Joo Doh

We have designed and fabricated superconducting coplanar waveguide resonators with fundamental frequencies from 2 to $9 \rm{GHz}$ and loaded quality factors ranging from a few hundreds to a several hundred thousands reached at temperatures…

Superconductivity · Physics 2008-12-16 M. Göppl , A. Fragner , M. Baur , R. Bianchetti , S. Filipp , J. M. Fink , P. J. Leek , G. Puebla , L. Steffen , A. Wallraff

We have studied Nb lambda/2 coplanar-waveguide (CPW) resonators whose resonant frequencies are 10-11 GHz. The resonators have different film thicknesses, t=0.05, 0.1, 0.2, and 0.3 um. We measured at low temperatures, T=0.02-5 K, one of the…

Superconductivity · Physics 2009-11-25 Kunihiro Inomata , Tsuyoshi Yamamoto , Michio Watanabe , Kazuaki Matsuba , Jaw-Shen Tsai

We characterize niobium nitride (NbN) $\lambda/2$ coplanar waveguide resonators, which were fabricated from a 10nm thick film on silicon dioxide grown by sputter deposition. For films grown at 120{\deg}C we report a superconducting critical…

Magnetic-field-resilient superconducting coplanar waveguide (SCPW) resonators are essential for developing integrated quantum circuits of various qubits and quantum memory devices. Molybdenum-Rhenium (MoRe), which is a disordered…

Superconductivity · Physics 2023-01-18 Chang Geun Yu , Bongkeon Kim , Yong-Joo Doh

Dielectric losses are one of the key factors limiting the coherence of superconducting qubits. The impact of materials and fabrication steps on dielectric losses can be evaluated using coplanar waveguide (CPW) microwave resonators. Here, we…

We demonstrate impedance-matched low-loss transmission lines with a signal wavelength more than 150 times smaller than the free space wavelength using superconducting nanowires on high permittivity substrates. A niobium nitride thin film is…

Superconducting coplanar waveguide (SCPW) resonators have a wide range of applications due to the combination of their planar geometry and high quality factors relative to normal metals. However, their performance is sensitive to both the…

Superconductivity · Physics 2015-05-20 Jeremy M. Sage , Vladimir Bolkhovsky , William D. Oliver , Benjamin Turek , Paul B. Welander

We discuss the design and implementation of thin film superconducting coplanar waveguide micro- resonators for pulsed ESR experiments. The performance of the resonators with P doped Si epilayer samples is compared to waveguide resonators…

Mesoscale and Nanoscale Physics · Physics 2015-06-04 H. Malissa , D. I. Schuster , A. M. Tyryshkin , A. A. Houck , S. A. Lyon

Advancements in the fabrication of superconducting quantum devices have highlighted tantalum as a promising material, owing to its low surface oxidation microwave loss at low temperatures. However, tantalum films exhibit significantly…

Quantum Physics · Physics 2024-05-07 Dengfeng Li , Jingjing Hu , Yuan Li , Shuoming An

We present an experimental approach for cryogenic dielectric measurements on ultra-thin insulating films. Based on a coplanar microwave waveguide design we implement superconducting quarter-wave resonators with inductive coupling, which…

We present simulations and analytic calculations of the electromagnetic microwave fields of coplanar waveguide (CPW) resonators in the vicinity of highly conducting metallic samples. The CPW structures are designed with the aim of…

Mesoscale and Nanoscale Physics · Physics 2015-06-23 Conrad Clauss , Martin Dressel , Marc Scheffler

Universal quantum computers promise to solve computational problems that are beyond the capabilities of known classical algorithms. To realize such quantum hardware on a superconducting material platform, a vast number of physical qubits…

The high critical magnetic field and relatively high critical temperature of niobium nitride (NbN) make it a promising material candidate for applications in superconducting quantum technology. However, NbN-based devices and circuits are…

The sensitivity of microwave kinetic inductance detectors (MKIDs) based on coplanar waveguides (CPWs) needs to be improved by at least an order of magnitude to satisfy the requirements for space-based terahertz astronomy. Our aim is to…

Superconductivity · Physics 2012-06-05 R. M. J. Janssen , A. Endo , J. J. A. Baselmans , P. J. de Visser , R. Barends , T. M. Klapwijk

Superconducting coplanar waveguide (CPW), resonators are powerful and versatile tools used in areas ranging from radiation detection to circuit quantum electrodynamics. Their potential for low intrinsic losses makes them attractive as…

Strongly Correlated Electrons · Physics 2017-07-05 Dejan Davidovikj , Nicola Manca , Herre S. J. van der Zant , Andrea D. Caviglia , Gary A. Steele
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