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The operation of superconducting coplanar waveguide cavities, as used for circuit quantum electrodynamics and kinetic inductance detectors, in perpendicular magnetic fields normally leads to a reduction of the device performance due to…

Superconductivity · Physics 2015-05-27 Daniel Bothner , Tobias Gaber , Matthias Kemmler , Dieter Koelle , Reinhold Kleiner

We have looked into cobalt disilicide (CoSi$_2$) as a potential building block for superconducting quantum circuits. In order to achieve this, we annealed a thin layer of Co to create 10-105 nm thick microwave cavities from CoSi$_2$…

We present fast tunable superconducting microwave resonators fabricated from planar NbN on a sapphire substrate. The $3\lambda/4$ wavelength resonators are tuning fork shaped and tuned by passing a dc current which controls the kinetic…

Applied Physics · Physics 2020-10-28 S. Mahashabde , E. Otto , D. Montemurro , S. de Graaf , S. Kubatkin , A. Danilov

We characterize low-loss electron-beam evaporated niobium thin films deposited under ultra-high vacuum conditions. Slow deposition yields films with a high superconducting transition temperature ($9.20 \pm 0.06 \rm ~K$) as well as a…

Superconducting coplanar waveguide resonators are essential components in quantum processors, where their internal quality factor (Qi) constrains qubit coherence and readout fidelity. In niobium devices, microwave losses at millikelvin…

Quantum Physics · Physics 2026-04-13 Anas Alkhazaleh , Juan Villegas , Florent Ravaux , Alexey Zharinov

The performance of superconducting circuits for quantum computing is limited by materials losses. In particular, coherence times are typically bounded by two-level system (TLS) losses at single photon powers and millikelvin temperatures.…

Superconducting microwave resonators play a pivotal role in superconducting quantum circuits. The ability to fine-tune their resonant frequencies provides enhanced control and flexibility. Here, we introduce a frequency-tunable…

We describe the design and characterization of superconducting coplanar waveguide cavities tailored to facilitate strong coupling between superconducting quantum circuits and single trapped Rydberg atoms. For initial superconductor-atom…

Superconductivity · Physics 2024-06-12 M. A. Beck , J. A. Isaacs , D. Booth , J. D. Pritchard , M. Saffman , R. McDermott

The performance of superconducting microwave circuits is strongly influenced by the material properties of the superconducting film and substrate. While progress has been made in understanding the importance of surface preparation and the…

We perform broadband phase sensitive measurements of the reflection coefficient from 45 MHz up to 20 GHz employing a vector network analyzer with a 2.4 mm coaxial sensor which is terminated by the sample under test. While the material…

Materials Science · Physics 2008-05-12 Elvira Ritz , Martin Dressel

Planar superconducting microwave resonators are key elements in a variety of technical applications and also act as sensitive probes for microwave spectroscopy of various materials of interest. Here superconducting Pb is a suitable material…

Superconductivity · Physics 2016-10-11 Nikolaj G Ebensperger , Markus Thiemann , Martin Dressel , Marc Scheffler

Superconducting boron doped silicon is a promising material for integrated silicon quantum devices. In particular, its low electronic density and moderate disorder make it a suitable candidate for the fabrication of large inductances with…

Superconductivity · Physics 2021-06-25 P. Bonnet , F. Chiodi , D. Flanigan , R. Delagrange , N. Brochu , D. Débarre , H. le Sueur

The overall, loaded quality factor $Q_\mathrm{L}$ quantifies the loss of energy stored in a resonator. Here we discuss on general grounds how $Q_\mathrm{L}$ of a planar microwave resonator made of a conventional superconductor should depend…

Superconductivity · Physics 2024-12-12 Elies Ben Achour , Cenk Beydeda , Gabriele Untereiner , Martin Dressel , Marc Scheffler

We have studied Nb lambda/2 coplanar-waveguide (CPW) resonators whose resonant frequencies are 10-11 GHz. The resonators have different film thicknesses, t=0.05, 0.1, 0.2, and 0.3 um. We measured at low temperatures, T=0.02-5 K, one of the…

Superconductivity · Physics 2009-11-25 Kunihiro Inomata , Tsuyoshi Yamamoto , Michio Watanabe , Kazuaki Matsuba , Jaw-Shen Tsai

Fabrication processes involving anhydrous hydrofluoric vapor etching are developed to create high-$Q$ aluminum superconducting microwave resonators on free-standing silicon membranes formed from a silicon-on-insulator wafer. Using this…

Quantum Physics · Physics 2016-01-18 Paul B. Dieterle , Mahmoud Kalaee , Johannes Fink , Oskar Painter

We have developed a low temperature, high-resolution microwave surface impedance probe that is able to operate in high static magnetic fields. Surface impedance is measured by cavity perturbation of dielectric resonators, with sufficient…

Superconductivity · Physics 2009-11-11 W. A. Huttema , B. Morgan , P. J. Turner , W. N. Hardy , Xiaoqing Zhou , D. A. Bonn , Ruixing Liang , D. M. Broun

We experimentally investigate the vortex induced energy losses in niobium coplanar waveguide resonators with and without quasihexagonal arrays of nanoholes (antidots), where large-area antidot patterns have been fabricated using…

Superconductivity · Physics 2015-06-03 D. Bothner , C. Clauss , E. Koroknay , M. Kemmler , T. Gaber , M. Jetter , M. Scheffler , P. Michler , M. Dressel , D. Koelle , R. Kleiner

We fabricate superconducting ion traps with niobium and niobium nitride and trap single 88Sr ions at cryogenic temperatures. The superconducting transition is verified and characterized by measuring the resistance and critical current using…

Quantum Physics · Physics 2010-12-15 Shannon X. Wang , Yufei Ge , Jaroslaw Labaziewicz , Eric Dauler , Karl Berggren , Isaac L. Chuang

We present superconducting microwave-frequency resonators based on NbTiN nanowires. The small cross section of the nanowires minimizes vortex generation, making the resonators resilient to magnetic fields. Measured intrinsic quality factors…

Mesoscale and Nanoscale Physics · Physics 2016-04-13 N. Samkharadze , A. Bruno , P. Scarlino , G. Zheng , D. P. DiVincenzo , L. DiCarlo , L. M. K. Vandersypen

We have measured noise in thin-film superconducting coplanar waveguide resonators. This noise appears entirely as phase noise, equivalent to a jitter of the resonance frequency. In contrast, amplitude fluctuations are not observed at the…

Superconductivity · Physics 2015-06-25 Jiansong Gao , Benjamin A. Mazin , Peter K. Day , Jonas Zmuidzinas , Henry G. LeDuc