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Two critical characteristics for any MEMS resonator are the quality factor ($Q$) and the temperature coefficient of frequency ($TCF$). The connection between $Q$ and $TCF$ is demonstrated here with a phenomenological anharmonic oscillator…
The excellent mechanical properties make graphene promising for realizing nanomechanical resonators with high resonant frequencies, large quality factors, strong nonlinearities, and the capability to effectively interface with various…
The enormous stiffness and low density of graphene make it an ideal material for nanoelectromechanical (NEMS) applications. We demonstrate fabrication and electrical readout of monolayer graphene resonators, and test their response to…
Micro- and nanoelectromechanical system (MEMS and NEMS) resonators can exhibit rich nonlinear dynamics as they are often operated at large amplitudes with high quality factors and possess a high mode density with a variety of nonlinear…
Depending on the type of Micro-Electro-Mechanical System (MEMS), packaging costs are contributing up to 80% of the total device cost. Each MEMS device category, its function and operational environment will individually dictate the…
We present the coupled oscillator: a new mechanism for signal amplification with widespread application in metrology. We introduce the mechanical theory of this framework, and support it by way of simulations. We present a particular…
Reservoir computing offers an energy-efficient alternative to deep neural networks (DNNs) by replacing complex hidden layers with a fixed nonlinear system and training only the final layer. This work investigates nanoelectromechanical…
A sensor that integrates high sensitivity micro-Hall effect magnetometry and high-frequency electron paramagnetic resonance spectroscopy capabilities on a single semiconductor chip is presented. The Hall-effect magnetometer was fabricated…
Microelectromechanical (MEMS) and nanoelectromechanical systems (NEMS) are ideal candidates for exploring quantum fluids since they can be manufactured reproducibly, cover the frequency range from hundreds of kilohertz up to gigahertz and…
There are some issues with traditional whispering gallery mode (WGM) resonators like poor light extraction and a dense mode spectrum. In this paper we introduce a solution to these limitations by proposing open WGM (OWGM) resonators that…
For quartz crystal resonators of thickness-shear type, the vibration frequency and mode shapes, which are key features of resonators in circuit applications, reflect the basic material and structural properties of the quartz plate and its…
In the past decade, optical frequency combs generated by high-Q micro-resonators, or micro-combs, which feature compact device footprints, high energy efficiency, and high-repetition-rates in broad optical bandwidths, have led to a…
Long-lived, high-frequency phonons are valuable for applications ranging from optomechanics to emerging quantum systems. For scientific as well as technological impact, we seek high-performance oscillators that offer a path towards…
The measurement of micron-sized mechanical resonators by electrical techniques is difficult, because of the combination of a high frequency and a small mechanical displacement which together suppress the electromechanical coupling. The only…
This paper provides a concise yet comprehensive review of recent advancements in millimeter-wave (mm-wave) oscillators below 100 GHz and sub-terahertz (sub-THz/THz) oscillators above 100 GHz for next-generation computing and communication…
A novel frequency modulated MEMS magnetometer is presented. The new device is inspired by the magnetic force microscopy technique, it combines standard MEMS technology with magnetic elements to obtain a magnetometer with potential for low…
One of the main challenges to overcome to perform nanomechanical Mass Spectrometry (NEMS-MS) analysis in a practical time frame stems from the size mismatch between the analyte beam and the extremely small nanomechanical detector area. We…
Magnetic metamaterials consist of magnetic resonators smaller in size than their excitation wavelengths. Their unique electromagnetic properties were characterized by the effective media theory at the early stage. However, the effective…
Among various plasmonic waveguides, the metal-insulator-metal (MIM) type is the most promising for true subwavelength photonic integration. To date, many photonic devices based on MIM waveguides have been investigated, including resonators.…
Microresonator frequency combs offer tremendous opportunity to advance applications in fundamental research and technology by linking the optical and microwave frequency domains. Kerr-nonlinear microresonators further enable the generation…