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We systematically study the performance of compact lumped element planar microwave $\mathrm{Nb_{70}Ti_{30}N}$ (NbTiN) resonators operating at 5 GHz in external in-plane magnetic fields up to 440 mT, a broad temperature regime from 2.2 K up…

Measuring the internal quality factor of coplanar waveguide superconducting resonators is an established method of determining small losses in superconducting devices. Traditionally, the resonator losses are only attributed to two-level…

Quantum Physics · Physics 2025-07-25 Ashish Alexander , Christopher G. Weddle , Christopher J. K. Richardson

We describe measurements on microwave coplanar resonators designed for quantum bit experiments. Resonators have been patterned onto sapphire and silicon substrates, and quality factors in excess of a million have been observed. The resonant…

Superconductivity · Physics 2009-11-13 J. E. Healey , T. Lindstrom , M. S. Colclough , C. M. Muirhead , A. Ya Tzalenchuk

The quantization of superconducting transmission-line resonators is usually introduced phenomenologically by modeling the resonator as an effective LC circuit and imposing canonical commutation relations on macroscopic variables such as…

Quantum Physics · Physics 2026-05-12 Miao-Miao Yi , Guo-Jian Qiao , Xin Yue , C. P. Sun

We design and fabricate two types of superconducting niobium coplanar waveguide microwave resonators with different coupling capacitors on high purity Si substrates. Their microwave transmissions are measured at the temperatures of 20 mK.…

We systematically investigate the influence of the fabrication process on dielectric loss in aluminum-on-silicon superconducting coplanar waveguide resonators with internal quality factors ($Q_i$) of about one million at the single-photon…

We demonstrate the operation of superconducting coplanar microwave resonators in a very large frequency range up to 50 GHz. The resonators are fabricated from niobium thin films on sapphire substrates and optimized for these high…

The semicylindrical microresonator with relatively simple excitation with a plane wave is studied. The resonator is formed on the base of the dielectric/metal/dielectric structure, where the wave energy penetrates into resonator through a…

We discuss the design and implementation of thin film superconducting coplanar waveguide micro- resonators for pulsed ESR experiments. The performance of the resonators with P doped Si epilayer samples is compared to waveguide resonators…

Mesoscale and Nanoscale Physics · Physics 2015-06-04 H. Malissa , D. I. Schuster , A. M. Tyryshkin , A. A. Houck , S. A. Lyon

We present fast tunable superconducting microwave resonators fabricated from planar NbN on a sapphire substrate. The $3\lambda/4$ wavelength resonators are tuning fork shaped and tuned by passing a dc current which controls the kinetic…

Applied Physics · Physics 2020-10-28 S. Mahashabde , E. Otto , D. Montemurro , S. de Graaf , S. Kubatkin , A. Danilov

The electromagnetic scattering resonances of a non-magnetic object much smaller than the incident wavelength in vacuum can be either described by the electroquasistatic approximation of the Maxwell's equations if its permittivity is…

Mesoscale and Nanoscale Physics · Physics 2020-11-11 Carlo Forestiere , Giovanni Miano , Guglielmo Rubinacci

Recent experiments on superconducting cavities have found that under large radio-frequency (RF) electromagnetic fields the quality factor can improve with increasing field amplitude, a so-called "anti-Q slope." Linear theories of…

We characterize niobium nitride (NbN) $\lambda/2$ coplanar waveguide resonators, which were fabricated from a 10nm thick film on silicon dioxide grown by sputter deposition. For films grown at 120{\deg}C we report a superconducting critical…

The performance of state-of-the-art superconducting quantum devices is currently limited by microwave dielectric losses at different surfaces and interfaces. {\alpha}-tantalum is a superconductor that has proven effective in reducing…

Applications in quantum information processing and photon detectors are stimulating a race to produce the highest possible quality factor on-chip superconducting microwave resonators. We have tested the surface-dominated loss hypothesis by…

Superconductivity · Physics 2012-06-06 K. Geerlings , S. Shankar , E. Edwards , L. Frunzio , R. J. Schoelkopf , M. H. Devoret

Quench of superconducting radio-frequency cavities frequently leads to the lowered quality factor Q0, which had been attributed to the additional trapped magnetic flux. Here we demonstrate that the origin of this magnetic flux is purely…

Losses in superconducting planar resonators are presently assumed to predominantly arise from surface-oxide dissipation, due to experimental losses varying with choice of materials. We model and simulate the magnitude of the loss from…

Single photon level quality factors of 500x10^3 are shown in NbTiN superconducting resonators at millikelvin temperatures. This result originates from the intrinsic low dielectric loss of NbTiN, as demonstrated by comparison with Ta, and by…

Mesoscale and Nanoscale Physics · Physics 2010-07-15 R. Barends , N. Vercruyssen , A. Endo , P. J. de Visser , T. Zijlstra , T. M. Klapwijk , P. Diener , S. J. C. Yates , J. J. A. Baselmans

Ambient magnetic field, if trapped in the penetration depth, leads to the residual resistance and therefore sets the limit for the achievable quality factors in superconducting niobium resonators for particle accelerators. Here we show that…

Accelerator Physics · Physics 2015-06-23 A. Romanenko , A. Grassellino , A. C. Crawford , D. A. Sergatskov , O. Melnychuk

High-stress Si$_3$N$_4$ nanoresonators have become an attractive choice for electro- and optomechanical devices. Membrane resonators can achieve quality factor ($Q$) - frequency ($f$) products exceeding $10^{13}$ Hz, enabling (in principle)…

Mesoscale and Nanoscale Physics · Physics 2016-03-07 A. H. Ghadimi , D. J. Wilson , T. J. Kippenberg