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Graphene layers were created on both C and Si faces of semi-insulating, on-axis, 4H- and 6H-SiC substrates. The process was performed under high vacuum (<10-4 mbar) in a commercial chemical vapor deposition SiC reactor. A method for H2…

With expanding interest in graphene-based electronics, it is crucial that high quality graphene films be grown. Sublimation of Si from the 4H-SiC(0001) Si-terminated) surface in ultrahigh vacuum is a demonstrated method to produce epitaxial…

Materials Science · Physics 2009-11-11 J. Hass , C. A. Jeffrey , R. Feng , T. Li , X. Li , Z. Song , C. Berger , W. A. de Heer , P. N. First , E. H. Conrad

Growth of epitaxial graphene on the C-face of SiC has been investigated. Using a confinement controlled sublimation (CCS) method, we have achieved well controlled growth and been able to observe propagation of uniform monolayer graphene.…

Materials Science · Physics 2012-11-29 Rui Zhang , Yunliang Dong , Wenjie Kong , Wenpeng Han , Pingheng Tan , Zhimin Liao , Xiaosong Wu , Dapeng Yu

The formation of graphene on the (0001) surface of SiC (the Si-face) is studied by atomic force microscopy, low-energy electron microscopy, and scanning tunneling microscopy/spectroscopy. The graphene forms due to preferential sublimation…

Materials Science · Physics 2023-05-03 Luxmi , N. Srivastava , R. M. Feenstra , P. J. Fisher

Patterning of graphene is key for device fabrication. We report a way to increase or reduce the number of layers in epitaxial graphene grown on the C-face (000-1) of silicon carbide by the deposition of a 120 nm to 150nm-thick silicon…

We have determined the growth mode of graphene on SiC(0001) and SiC(000-1) using ultra-thin, isotopically-labeled Si13C `marker layers' grown epitaxially on the Si12C surfaces. Few-layer graphene overlayers were formed via thermal…

Materials Science · Physics 2011-08-15 J. B. Hannon , M. Copel , R. M. Tromp

The morphology of graphene formed on the (000-1) surface (the C-face) and the (0001) surface (the Si-face) of SiC, by annealing in ultra-high vacuum or in an argon environment, is studied by atomic force microscopy and low-energy electron…

Materials Science · Physics 2015-05-20 Luxmi , N. Srivastava , Guowei He , R. M. Feenstra

The formation of graphene on the SiC(000-1) surface (the C-face of the {0001} surfaces) has been studied, utilizing both disilane and neon environments. In both cases, the interface between the graphene and the SiC is found to be different…

Mesoscale and Nanoscale Physics · Physics 2015-06-05 Guowei He , N. Srivastava , R. M. Feenstra

Epitaxial graphene grown on SiC by the confinement controlled sublimation method is reviewed, with an emphasis on multilayer and monolayer epitaxial graphene on the carbon face of 4H-SiC and on directed and selectively grown structures…

Physical vapor deposition of Si onto transferred graphene is investigated. At elevated temperatures, Si nucleates preferably on wrinkles and multilayer graphene islands. In some cases, however, Si can be quasi-selectively grown only on the…

The morphology of graphene on SiC {0001} surfaces formed in various environments including ultra-high vacuum, 1 atm of argon, and 10^-6 to 10^-4 Torr of disilane is studied by atomic force microscopy, low-energy electron microscopy, and…

Materials Science · Physics 2015-05-30 N. Srivastava , Guowei He , Luxmi , P. C. Mende , R. M. Feenstra , Yugang Sun

An investigation of the early stage formation of graphene on the C-face of 6H-SiC is presented. We show that the sublimation of few atomic layers of Si out of the SiC substrate is not homogeneous. In good agreement with the results of…

Materials Science · Physics 2009-11-13 N. Camara , G. Rius , J. -R. Huntzinger , A. Tiberj , L. Magaud , N. Mestres , P. Godignon , J. Camassel

We investigate the growth of the graphene buffer layer and the involved step bunching behavior of the silicon carbide substrate surface using atomic force microscopy. The formation of local buffer layer domains are identified to be the…

We investigate the microscopic processes leading to graphene growth by the chemical vapor deposition of propane in the argon atmosphere at the SiC surface. Experimentally, it is known that the presence of argon fastens the dehydrogenation…

Materials Science · Physics 2017-09-13 Malgorzata Wierzbowska , Adam Dominiak , Kamil Tokar

We report the growth of Si nanostructures, either as thin films or nanoparticles, on graphene substrates. The Si nanostructures are shown to be single crystalline, air stable and oxidation resistive, as indicated by the observation of a…

Materials Science · Physics 2020-06-02 Naili Yue , Joshua Myers , Liqin Su , Wentao Wang , Fude Liu , Raphael Tsu , Yan Zhuang , Yong Zhang

Graphene on silicon carbide (SiC) bears great potential for future graphene electronic applications because it is available on the wafer-scale and its properties can be custom-tailored by inserting various atoms into the graphene/SiC…

Materials Science · Physics 2018-11-07 T. A. de Jong , E. E. Krasovskii , C. Ott , R. M. Tromp , S. J. van der Molen , J. Jobst

Techniques for mass-production of large area graphene using an industrial scale thin film deposition tool could be the key to the practical realization of a wide range of technological applications of this material. Here, we demonstrate the…

Materials Science · Physics 2013-02-20 Genhua Pan , Mark Heath , David Horsell , M. Lesley Wears

We present an investigation of large, isolated, graphene ribbons grown on the C-face of on-axis semi-insulating 6H-SiC wafers. Using a graphite cap to cover the SiC sample, we modify the desorption of the Si species during the Si…

Materials Science · Physics 2013-05-29 N. Camara , G. Rius , J-R. Huntzinger , A. Tiberj , N. Mestres , F. Perez-Murano , P. Godignon , J. Camassel

Graphene films prepared by heating the SiC(000-1) surface (the C-face of the {0001} surfaces) in a Si-rich environment are studied using low-energy electron diffraction (LEED) and low-energy electron microscopy (LEEM). Upon graphitization,…

Mesoscale and Nanoscale Physics · Physics 2015-09-16 Guowei He , N. Srivastava , R. M. Feenstra

The electronic properties of few-layer graphene grown on the carbon-face of silicon carbide (SiC) are found to be strongly dependent on the number of layers. The carrier mobility is larger in thicker graphene because substrate-related…

Mesoscale and Nanoscale Physics · Physics 2015-05-30 Wenjuan Zhu , Christos Dimitrakopoulos , Marcus Freitag , Phaedon Avouris
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