Related papers: Spectroscopy of mechanical dissipation in micro-me…
We develop a stoichiometric SiN membrane-based optoelectromechanical system, in which the properties of the mechanical resonator can be dynamically controlled by the piezoelectric actuation. The mode splitting is observed in the mechanical…
We study the optomechanical properties of stoichiometric SiN resonators through a combination of spectroscopic and interferometric imaging techniques. At room temperature, we demonstrate ultrahigh quality factors of $5 \times 10^7$ and a $f…
We study mechanical dissipation of the fundamental mode of millimeter-sized, high quality-factor ($Q$) metalized silicon nitride membranes at temperatures down to 14 mK using a three-dimensional optomechanical cavity. Below 200 mK, high-$Q$…
We demonstrate a high-Q ($>5 \times 10^{6}$) swept-frequency membrane mechanical resonator achieving octave resonance tuning via an integrated heater and an unprecedented acceleration noise floor below 1 $\mu$g Hz$^{-1/2}$ for frequencies…
We report on low mechanical loss in a high-stress silicon nitride (Si_{3}N_{4}) membrane at temperatures below 100 mK. We isolate a membrane via a phononic shield formed within a supporting silicon frame, and measure the mechanical quality…
High-quality-factor ($Q$) mechanical resonators are essential components for precise sensing and control of mechanical motion at a quantum level. While amorphous materials such as SiN have been widely used in high-$Q$ mechanical resonators…
We study the mechanical quality factors of bilayer aluminum/silicon-nitride membranes. By coating ultrahigh-Q Si3N4 membranes with a more lossy metal, we can precisely measure the effect of material loss on Q's of tensioned resonator modes…
All quantum optomechanics experiments to date operate at cryogenic temperatures, imposing severe technical challenges and fundamental constraints. Here we present a novel design of on-chip mechanical resonators which exhibit fundamental…
Dissipation in the flexural dynamics of doubly clamped nanomechanical bar resonators is investigated using molecular dynamics simulation. The dependence of the quality factor Q on temperature and the size of the resonator is calculated from…
High-stress Si$_3$N$_4$ nanoresonators have become an attractive choice for electro- and optomechanical devices. Membrane resonators can achieve quality factor ($Q$) - frequency ($f$) products exceeding $10^{13}$ Hz, enabling (in principle)…
Systems with low mechanical dissipation are extensively used in precision measurements such as gravitational wave detection, atomic force microscopy and quantum control of mechanical oscillators via opto- and electromechanics. The…
We measure the energy relaxation rate of single- and few-layer molybdenum disulphide ($\mathrm{MoS_2}$) nanomechanical resonators by detecting the resonator ring-down. Recent experiments on these devices show a remarkably low quality…
Mechanical spectroscopy, i.e. cyclic deformations at varying frequencies, is used theoretically and numerically to measure dissipation in model glasses. From a normal mode analysis, we show that in the high-frequency THz regime where…
The quality factor of a mechanical resonator is an important figure of merit for various sensing applications and for observing quantum behavior. Here, we demonstrate a technique to push the quality factor of a micro-mechanical resonator…
On-chip actuation and readout of mechanical motion is key to characterize mechanical resonators and exploit them for new applications. We capacitively couple a silicon nitride membrane to an off resonant radio-frequency cavity formed by a…
We have measured the mechanical dissipation in a sample of fused silica drawn into a rod. The sample was hung from a multiple-bob suspension, which isolated it from rubbing against its support, from recoil in the support structure, and from…
A semi-analytical study of the acoustic radiation losses associated with various transverse vibration modes of a micromechanical (MEMS) annular resonator is presented. The quality factor, Q, of such resonators is of interest in many…
State-of-the-art nanomechanical resonators are heralded as a central component for next-generation clocks, filters, resonant sensors and quantum technologies. To practically build these technologies will require monolithic integration of…
Hybrid systems consisting of a quantum emitter coupled to a mechanical oscillator are receiving increasing attention for fundamental science and potential applications in quantum technologies. In contrast to most of the presented works, in…
Freestanding Silicon nitride (SiN) devices are central to the field of nanomechanical resonators and for other technology applications such as transmission electron imaging and nanopore bioassays. The nanofabrication techniques used for…