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Tunneling defects in disordered materials form spurious two-level systems which are a major source of decoherence for micro-fabricated quantum devices. For superconducting qubits, defects in tunnel barriers of submicrometer-sized Josephson…

Quantum Physics · Physics 2022-03-09 Alexander Bilmes , Serhii Volosheniuk , Alexey V. Ustinov , Jürgen Lisenfeld

We present a novel shadow evaporation technique for the realization of junctions and capacitors. The design by E-beam lithography of strongly asymmetric undercuts on a bilayer resist enables in-situ fabrication of junctions and capacitors…

Josephson junctions are the principal circuit element in numerous superconducting quantum information devices and can be readily integrated into large-scale electronics. However, device integration at the wafer scale necessarily depends on…

Increasing integration scale of superconductor electronics (SCE) requires employing kinetic inductors and self-shunted Josephson junctions (JJs) for miniaturizing inductors and JJs. We have been developing a ten-superconductor-layer…

Superconductivity · Physics 2025-12-02 Sergey K. Tolpygo , Ravi Rastogi , David Kim , Terence J. Weir , Neel Parmar , Evan B. Golden

The microscopic structure of ultra-thin oxide barriers often plays a major role in modern nano-electronic devices. In the case of superconducting electronic circuits, their operation depends on the electrical non-linearity provided by one…

Materials Science · Physics 2015-08-25 Timothy C. DuBois , Martin J. Cyster , George Opletal , Salvy P. Russo , Jared H. Cole

We report on the fabrication and measurements of a superconducting junction of a single-crystalline Au nanowire, connected to Al electrodes. Current-Voltage characteristic curve shows clear supercurrent branch below the superconducting…

This paper presents the fabrication and characterization of superconducting qubit components from titanium nitride (TiN) and aluminum nitride (AlN) layers to create Josephson junctions and superconducting resonators in an all-nitride…

Applied Physics · Physics 2025-08-05 Benedikt Schoof , Moritz Singer , Simon Lang , Harsh Gupta , Daniela Zahn , Johannes Weber , Marc Tornow

Superconducting qubit fabrication innovations continue to be explored to achieve higher performance. Despite improvements to base layer fabrication and processing, resist-based Josephson junction (JJ) schemes have largely remained…

Quantum Physics · Physics 2026-05-18 Tathagata Banerjee , Stephen Daniel Funni , Saswata Roy , Judy J. Cha , Valla Fatemi

We present tunnel spectroscopy experiments on the proximity effect in lateral superconductor-normal metal-superconductor (SNS) Josephson junctions. Our weak link is embedded into a superconducting (S) ring allowing phase biasing of the…

Superconductivity · Physics 2015-05-28 M. Meschke , J. T. Peltonen , J. P. Pekola , F. Giazotto

The superconducting circuits involving Josephson junction offer macroscopic quantum two-level system (qubit) which are coupled to cavity resonators and are operated via microwave signals. In this work, we study the dynamics of…

Quantum Physics · Physics 2022-07-12 Prashant Shukla

$Al/AlO_x/Al$-layer systems are frequently used for Josephson junction-based superconducting devices. Although much work has been devoted to the optimization of the superconducting properties of these devices, systematic studies on…

Materials Science · Physics 2020-01-07 S. Fritz , L. Radtke , R. Schneider , M. Weides , D. Gerthsen

Van der Waals (vdW) Josephson junctions can possibly accelerate the development of advanced superconducting device that utilizes the unique properties of two-dimensional (2D) transition metal dichalcogenide (TMD) superconductors such as…

Superconductivity · Physics 2022-11-17 Chuanwen Zhao , Xin Yi , Qiao Chen , Chengyu Yan , Shun Wang

We have studied low-frequency resistance fluctuations in shadow-evaporated Al/AlOx/Al tunnel junctions. Between 300 K and 5 K the spectral density follows a 1/f-law. Below 5 K, individual defects distort the 1/f-shape of the spectrum. The…

One of the practical limitations of solid-state superconducting quantum processors technology is frequency crowding due to low qubits fabrication reproducibility. Josephson junction 100 nm-scale nonlinear inductance of the qubits still…

Demonstrating the topological protection of Andreev states in Josephson junctions is an experimental challenge. In particular the telltale $4\pi$ periodicity expected for the current phase relation of topological Josephson junctions has…

Mesoscale and Nanoscale Physics · Physics 2019-02-27 A. Murani , B. Dassonneville , A. Kasumov , J. Basset , M. Ferrier , R. Deblock , S. Guéron , H. Bouchiat

A fabrication process for Nb/Al-AlOx/Nb Josephson junctions (JJs) with sizes down to 200 nm has been developed on a 200-mm-wafer tool set typical for CMOS foundry. This process is the core of several nodes of a roadmap for fully-planarized…

We report on graphene-based Josephson junctions with contacts made from lead. The high transition temperature of this superconductor allows us to observe the supercurrent branch at temperatures up to $\sim 2$ K, at which point we can detect…

Mesoscale and Nanoscale Physics · Physics 2013-06-25 I. V. Borzenets , U. C. Coskun , S. J. Jones , G. Finkelstein

We have performed a detailed study of the time stability and reproducibility of sub-micron $Al/AlO_{x}/Al$ tunnel junctions, fabricated using standard double angle shadow evaporations. We have found that by aggressively cleaning the…

Mesoscale and Nanoscale Physics · Physics 2015-05-28 I. M. Pop , T. Fournier , T. Crozes , F. Lecocq , I. Matei , B. Pannetier , O. Buisson , W. Guichard

We report on high quality local tunnel spectroscopy measurements in superconductors using in-situ fabricated superconducting tips as counterelectrode. The experiments were made at very low temperatures using a dilution refrigerator and a…

Superconductivity · Physics 2009-11-10 J. G. Rodrigo , H. Suderow , S. Vieira

Superconducting qubits in today's quantum processing units are typically fabricated with angle-evaporated aluminum--aluminum-oxide--aluminum Josephson junctions. However, there is an urgent need to overcome the limited reproducibility of…

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