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Related papers: Atomic layer deposition of HfO2 on graphene from H…

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Although technologically challenging, the integration of ferroelectric thin films with graphene spintronics potentially allows the realization of highly efficient, electrically tuneable, non-volatile memories. Here, the atomic layer…

We demonstrate the atomic layer deposition of high-quality HfO2 film on graphene and report the magnitude of remote oxide phonon (ROP) scattering in dual-oxide graphene transistors. Top gates with 30 nm HfO2 oxide layer exhibit excellent…

Materials Science · Physics 2010-09-17 Ke Zou , Xia Hong , Derek Keefer , Jun Zhu

On highly oxygen deficient thin films of hafnium oxide (hafnia, HfO$_{2-x}$) contaminated with adsorbates of carbon oxides, the formation of hafnium carbide (HfC$_x$) at the surface during vacuum annealing at temperatures as low as 600…

Materials Science · Physics 2016-06-28 C. Rodenbücher , E. Hildebrandt , K. Szot , S. U. Sharath , J. Kurian , P. Komissinskiy , U. Breuer , R. Waser , L. Alff

In the present work, HfO2 thin film (100nm) has been deposited by sputtering technique and annealed at various temperatures ranging from 400 to 1000\degree (in step of 200 \degree) in O2 ambient for 10 min. The samples have been…

Materials Science · Physics 2016-05-05 Shilpi Pandey , Prateek Kothari , Sunil Kumar Sharma , Seema Verma , K. J. Rangra

The deposition of dielectric materials on graphene is one of the bottlenecks for unlocking the potential of graphene in electronic applications. In this paper we demonstrate the plasma enhanced atomic layer deposition of 10 nm thin high…

1.8 micrometer-thick magnesium hydride films were synthesized in a single-step process by reactive plasma-assisted sputtering. The MgH2 thin films, which were deposited on two types of flexible surfaces (namely graphite and polyimide foils)…

Applied Physics · Physics 2023-11-03 Huy Le-Quoc , Marie Coste , Ana Lacoste , L. Laversenne

We investigate the carrier mobility in mono- and bi-layer graphene with a top HfO2 dielectric, as a function of the HfO2 film thickness and temperature. The results show that the carrier mobility decreases during the deposition of the first…

Mesoscale and Nanoscale Physics · Physics 2015-05-20 Babak Fallahazad , Seyoung Kim , Luigi Colombo , Emanuel Tutuc

Hf silicate films (HfO_2)_{0.25}(SiO_2)_{0.75} with thicknesses in the range 4-20 nm were grown on silicon substrate by atomic layer deposition at 350 deg.C.The Hf distributions in as-grown and 800 deg.C annealed films were investigated by…

Materials Science · Physics 2010-09-28 J. Liu , X. Wu , W. N. Lennard , D. Landheer , M. W. C. Dharma-Wardana

This paper reports the synthesis and detailed characterization of graphite thin films produced by thermal decomposition of the (0001) face of a 6H-SiC wafer, demonstrating the successful growth of single crystalline films down to…

The deposition of atomically thin highly uniform chemically derived graphene (CDG) films on 300 mm SiO2/Si wafers is reported. We demonstrate that the very thin films can be lifted off to form uniform membranes than can be free-standing or…

Materials Science · Physics 2009-12-11 Hisato Yamaguchi , Goki Eda , Cecilia Mattevi , HoKwon Kim , Manish Chhowalla

We demonstrate the formation of epitaxial, ultrathin hafnia (HfO2) on graphene. Monoclinic hafnia (m-HfO2) forms as the end of a series of sequential oxidation reactions. Starting from Hf metal grown epitaxially on graphene, oxidation leads…

The metastable orthorhombic phase of hafnia is generally obtained in polycrystalline films, whereas in epitaxial films, its formation has been much less investigated. We have grown Hf0.5Zr0.5O2 films by pulsed laser deposition, and the…

Materials Science · Physics 2019-02-28 Jike Lyu , Ignasi Fina , Raul Solanas , Josep Fontcuberta , Florencio Sánchez

Heterostructures involving two-dimensional (2D) transition metal dichalcogenides and other materials such as graphene have a strong potential to be the fundamental building block of many electronic and opto-electronic applications. The…

Hafnium oxide (HfO2), particularly at low-dimensional scales, exhibits extensive promising applications in ultrahigh density devices like low-power logic and non-volatile memory devices due to its compatibility with current semiconductor…

Hydrogen is a promising energy carrier that can push forward the energy transition because of its high energy density (142 MJ kg-1), variety of potential sources, low weight and low environmental impact, but its storage for automotive…

We report on a large improvement in the wetting of Al2O3 thin films grown by un-seeded atomic layer deposition on monolayer graphene, without creating point defects. This enhanced wetting is achieved by greatly increasing the nucleation…

Materials Science · Physics 2014-11-14 Bruno Dlubak , Piran R. Kidambi , Robert S. Weatherup , Stephan Hofmann , John Robertson

We grew a 2 micron thick film of single-phase BiFeO3 on a Si (100) substrate by pulsed laser deposition with a substrate temperature of 575 oC and an oxygen partial pressure of 0.06 mbar. X ray diffraction analysis indicated that the film…

Materials Science · Physics 2025-04-04 Ramachandran Balakrishnan , Ambesh Dixit , Mamidanna Sri Ramachandra Rao

Oblique angle deposition of oxides is being famous for fabricating inhomogeneous thin films with variation of refractive index along thickness in a functional form. Inhomogeneous layers play a key role in the development of rugate…

Materials Science · Physics 2014-06-27 R B Tokas , S Jena , P Sarkar , Shyam polaki , S Thakur , S Basu , N K Sahoo

LaFeAsO1-xFx thin films were deposited successfully on (001)-oriented LaAlO3 and MgO substrates from stoichiometric LaFeAsO1-xFx polycrystalline targets with fluorine concentrations up to x = 0.25 by PLD. Room temperature deposition and…

Superconductivity · Physics 2009-11-13 E. Backen , S. Haindl , T. Niemeier , T. Freudenberg , J. Werner , G. Behr , L. Schultz , B. Holzapfel

Nanolaminated Al2O3/HfO2 thin films as well as single Al2O3 and HfO2 layers have been grown as gate dielectrics by Plasma Enhanced Atomic Layer Deposition (PEALD) technique on silicon carbide (4H-SiC) substrates. All the three dielectric…

Applied Physics · Physics 2021-04-29 Raffaella Lo Nigro , Emanuela Schilirò , Patrick Fiorenza , Fabrizio Roccaforte
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