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Fabrication processes involving anhydrous hydrofluoric vapor etching are developed to create high-$Q$ aluminum superconducting microwave resonators on free-standing silicon membranes formed from a silicon-on-insulator wafer. Using this…

Quantum Physics · Physics 2016-01-18 Paul B. Dieterle , Mahmoud Kalaee , Johannes Fink , Oskar Painter

Waveguide resonators are crucial elements in sensitive astrophysical detectors [1] and circuit quantum electrodynamics (cQED) [2]. Coupled to artificial atoms in the form of superconducting qubits [3, 4], they now provide a technologically…

Mesoscale and Nanoscale Physics · Physics 2013-01-22 Xiaoqing Zhou , Fredrik Hocke , Albert Schliesser , Achim Marx , Hans Huebl , Rudolf Gross , Tobias J. Kippenberg

We systematically study the performance of compact lumped element planar microwave $\mathrm{Nb_{70}Ti_{30}N}$ (NbTiN) resonators operating at 5 GHz in external in-plane magnetic fields up to 440 mT, a broad temperature regime from 2.2 K up…

Parasitic electromagnetic fields are shown to strongly suppress the quality (Q)-factor of superconducting coplanar waveguide resonators via non-local dissipation in the macroscopic environment. Numerical simulation and low temperature…

Superconductivity · Physics 2012-03-21 J. M. Hornibrook , E. E. Mitchell , D. J. Reilly

Low-loss superconducting rf devices are required when used for quantum computation. Here, we present a series of measurements and simulations showing that conducting losses in the packaging of our superconducting resonator devices affect…

Superconducting inductors with impedance surpassing the resistance quantum, i.e., superinductors, are important for quantum technologies because they enable the development of protected qubits, enhance coupling to systems with small…

We have designed, fabricated and characterized microwave resonators made out of thin films of granular aluminium (grAl) with different oxygen content. We extract the contribution of the large kinetic-inductance of this disordered…

Quantum computers are close to become a practical technology. Solid-state implementations based, for example, on superconducting devices strongly rely on the quality of the constituent materials. In this work, we fabricate and characterize…

Applied Physics · Physics 2021-12-08 M. S. Moeed , C. T. Earnest , J. H. Béjanin , A. S. Sharafeldin , M. Mariantoni

Long-lived, high-frequency phonons are valuable for applications ranging from optomechanics to emerging quantum systems. For scientific as well as technological impact, we seek high-performance oscillators that offer a path towards…

We have studied Nb lambda/2 coplanar-waveguide (CPW) resonators whose resonant frequencies are 10-11 GHz. The resonators have different film thicknesses, t=0.05, 0.1, 0.2, and 0.3 um. We measured at low temperatures, T=0.02-5 K, one of the…

Superconductivity · Physics 2009-11-25 Kunihiro Inomata , Tsuyoshi Yamamoto , Michio Watanabe , Kazuaki Matsuba , Jaw-Shen Tsai

Superconducting coplanar-waveguide (CPW) resonators are one of the key devices in circuit quantum electrodynamics (cQED). Their performance can be limited by dielectric losses in the substrate and in the material interfaces. Reliable…

Applied Physics · Physics 2020-08-26 Valtteri Lahtinen , Mikko Möttönen

As superconducting kinetic inductance detectors (KIDs) continue to grow in popularity for sensitive submillimeter detection and other applications, there is a drive to advance toward lower-loss devices. We present measurements of diagnostic…

High quality factor coplanar resonators are critical elements in superconducting quantum circuits. We describe the design, fabrication and measurement of stepped impedance resonators (SIRs), which are more compact in size than commonly used…

Quantum Physics · Physics 2017-10-30 Yirong Jin , Hui Deng , Xueyi Guo , Yarui Zheng , Keqiang Huang , Luhui Ning , Dongning Zheng

Superconducting thin-film metamaterial resonators can provide a dense microwave mode spectrum with potential applications in quantum information science. We report on the fabrication and low-temperature measurement of metamaterial…

Superconductivity · Physics 2015-05-06 B. L. T. Plourde , Haozhi Wang , Francisco Rouxinol , M. D. LaHaye

The performance of superconducting resonators underpins a wide range of modern quantum technologies, yet their quality factor often deviates at low temperatures from standard Mattis-Bardeen predictions. This discrepancy is often attributed…

Superconductivity · Physics 2026-05-12 Zhenyuan Sun , S Withington , Songyuan Zhao

We performed transmission spectroscopy experiments on coplanar half wavelength niobium resonators at a temperature T=4.2 K. We observe not only a strong dependence of the quality factor Q and the resonance frequency f_res on an externally…

Superconducting resonators and parametric amplifiers are important components in scientific systems such as kinetic inductance detector arrays, frequency-domain multiplexers for other superconducting bolometers, spin-ensemble based…

Superconductivity · Physics 2023-10-18 Songyuan Zhao , Stafford Withington , Christopher Niall Thomas

Research on spatially inhomogeneous weakly-coupled superconductors has recently received a boost of interest because of the experimental observation of a dramatic enhancement of the kinetic inductance with relatively low losses. Here, we…

Superconductivity · Physics 2023-09-06 Bo Fan , Abhisek Samanta , Antonio M. García-García

Material research is a key frontier in advancing superconducting qubit and circuit performance. In this work, we develop a simple and broadly applicable framework for accurately characterizing two-level system (TLS) loss using internal…

Superconductivity · Physics 2025-07-17 Guy Moshel , Sergei Masis , Moshe Schechter , Shay Hacohen-Gourgy

Coplanar microwave resonators made of 330 nm-thick superconducting YBCO have been realized and characterized in a wide temperature ($T$, 2-100 K) and magnetic field ($B$, 0-7 T) range. The quality factor $Q_L$ exceeds 10$^4$ below 55 K and…