Related papers: Micro Embossing of Ceramic Green Substrates for Mi…
Micro-indentation test with a micro flat-end cone indenter was employed to simulate micro embossing process and investigate the thermo-mechanical response of ceramic green substrates. The laminated low temperature co-fired ceramic green…
In this paper, we will report our achievements in developing large area patterning of multilayered ceramic green composites using roller embossing. The aim of our research is to pattern large area ceramic green composites using a modified…
This paper reports on formation of high aspect micro patterns on low temperature co-fired ceramic (LTCC) substrates by integrating micro inkjetting with electroless plating. Micro inkjetting was realized by using an inkjetting printer that…
In large area micro hot embossing, the process temperature plays a critical role to both the local fidelity of microstructure formation and global uniformity. The significance of low temperature hot embossing is to improve global flatness…
We report on the development of some process capabilities for a polymer-based, multi-layer microelectrofluidic platform, namely: the hot embossing process, metallization on polymer and polymer bonding. Hot embossing experiments were…
Low Temperature Cofired Ceramics (LTCC) has been a popular multi layer ceramic (MCM) packaging material for many electronic applications. The main advantage with LTCC would be its ability to embed a major part of the electronic circuit…
Advances in material science, bio-electronic, and implantable medicine combined with recent requests for eco-friendly materials and technologies inevitably formulate new challenges for nano- and micro-patterning techniques. Overall, the…
This paper presents the different processing steps of a new generic surface micromachining module for MEMS hermetic packaging at temperatures around 180 degrees C based on nickel plating and photoresist sacrificial layers. The advantages of…
Metal microstructured optical elements for grating-based X-ray phase-contrast interferometry were fabricated by using an innovative approach of microcasting: hot embossing technology with low melting temperature (280{\deg}C) metal alloy…
We report on the fabrication and mid-infrared transmission properties of free-standing thin metal films, periodically patterned with holes at periods down to 2 microns and area of 3x3 mm2. Square grids were fabricated by electron beam…
High quality micro- and nano-mechanical resonators are widely used in sensing, communications and timing, and have future applications in quantum technologies and fundamental studies of quantum physics. Crystalline thin-films are…
Integrating patterned, low-loss magnetic materials into microwave devices and circuits presents many challenges due to the specific conditions that are required to grow ferrite materials, driving the need for flip-chip and other indirect…
We report on the hot roller embossing of polymer sheets for the creation of microfluidic structures. Measurements conducted on 100 $\mu$m features showed that the lateral dimensions could be replicated to within 2% tolerance, while over 85%…
In order to take advantage of the enormous potential of graphene for future electronic micro-circuits and other applications it is necessary to develop reliable, rapid and widely applicable methods to visualize graphene based structures. We…
We describe a technique for surface and sub-surface micro-machining of glass substrates using tightly focused femtosecond laser pulses at a wavelength of 1660 nm. Although silicate glass is normally transparent at this wavelength, the…
Patterning of graphene into micro- and nano-ribbons allows for the tunability in emerging fields such as flexible electronic and optoelectronic devices, and is gaining interest for the production of more efficient reinforcement for…
Micropatterning techniques have become an important tool for the study of cell behavior in controlled microenvironments. As a consequence, several approaches for the creation of micropatterns have been developed in recent years. However,…
The spatially precise integration of arrays of micro-patterned two-dimensional (2D) crystals onto three-dimensionally structured Si/SiO$_2$ substrates represents an attractive strategy towards the low-cost system-on-chip integration of…
We present an investigation of the role of micropatterning on adhesion properties at soft deformable polydimethylsiloxane (PDMS)/ acrylic adhesive interfaces. Contrary to what has been observed for low aspect ratio rigid patterns, where the…
Periodic assemblies of nanoparticles are central to surface patterning, with applications in biosensing, energy conversion, and nanofabrication. Evaporation of colloidal droplets on substrates provides a simple yet effective route to…