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We investigate analytically the coupling of a coplanar waveguide resonator to a coplanar waveguide feedline. Using a conformal mapping technique we obtain an expression for the characteristic mode impedances and coupling coefficients of an…

Signal Processing · Electrical Eng. & Systems 2018-05-24 Ilya Besedin , Alexey P. Menushenkov

Low-loss superconducting rf devices are required when used for quantum computation. Here, we present a series of measurements and simulations showing that conducting losses in the packaging of our superconducting resonator devices affect…

A High-Q microwave (K band) MEMS resonator is presented, which empolys substrate integrated waveguide (SIW) and micromachined via-hole arrays by ICP process. Nonradiation dielectric waveguide (NRD) is formed by metal filled via-hole arrays…

Other Computer Science · Computer Science 2008-02-22 Z. Jian , Y. Yuanwei , Z. Yong , Chen Chen , J. Shixing

Scanning tunneling microscopy (STM) and micro-electromechanical systems (MEMS) have traditionally addressed vastly different length scales - one resolving atoms, the other engineering macroscopic motion. Here we unite these two fields to…

Mesoscale and Nanoscale Physics · Physics 2026-01-09 R. J. G. Elbertse , M. Xu , A. Keşkekler , S. Otte , R. A. Norte

This study investigates the use of spiral geometry in superconducting resonators to achieve high intrinsic quality factors, crucial for applications in quantum computation and quantum sensing. We fabricated Archimedean Spiral Resonators…

Quantum Physics · Physics 2025-04-08 Yusuke Tominaga , Shotaro Shirai , Yuji Hishida , Hirotaka Terai , Atsushi Noguchi

Micro- and nano-resonators have important applications including sensing, navigation, and biochemical detection. Their performance is quantified using the quality factor $Q$, which gives the ratio of the energy stored to the energy…

Materials Science · Physics 2020-01-08 Meng Fan , Aya Nawano , Jan Schroers , Mark D. Shattuck , Corey S. O'Hern

The performance of superconducting circuits for quantum computing is limited by materials losses. In particular, coherence times are typically bounded by two-level system (TLS) losses at single photon powers and millikelvin temperatures.…

Electromagnetic resonators are a versatile platform to harvest, filter and trap electromagnetic energy, at the basis of many applications from microwaves to optics. Resonators with a large intrinsic quality factor (Q) are highly desirable…

Optics · Physics 2020-02-04 Younes Radi , Alex Krasnok , Andrea Alú

We investigate the performance of microwave-frequency phononic crystal resonators fabricated on thin-film lithium niobate for integration with superconducting quantum circuits. For different design geometries at millikelvin temperatures, we…

Fabrication processes involving anhydrous hydrofluoric vapor etching are developed to create high-$Q$ aluminum superconducting microwave resonators on free-standing silicon membranes formed from a silicon-on-insulator wafer. Using this…

Quantum Physics · Physics 2016-01-18 Paul B. Dieterle , Mahmoud Kalaee , Johannes Fink , Oskar Painter

Reconfigurable electromagnetic structures (REMSs), such as reconfigurable reflectarrays (RRAs) or reconfigurable intelligent surfaces (RISs), hold significant potential to improve the spectral efficiency of wireless communication systems…

Signal Processing · Electrical Eng. & Systems 2025-12-16 Alexander Stutz-Tirri , Georg Schwan , Christoph Studer

We have fabricated superconducting microwave resonators in a lumped element geometry using single crystal silicon dielectric parallel plate capacitors with C >2 pF. Aluminum devices with resonant frequencies between 4.0 and 6.5 GHz…

Mesoscale and Nanoscale Physics · Physics 2011-06-21 S. Weber , K. W. Murch , D. H. Slichter , R. Vijay , I. Siddiqi

A spilt-ring resonator experiment suitable for senior physics undergraduates is described and demonstrated in detail. The apparatus consists of a conducting hollow cylinder with a narrow slit along its length and can be accurately modelled…

Physics Education · Physics 2018-11-06 J. S. Bobowski

We present a new approach to dielectric metasurface design that relies on a single resonator per unit cell and produces robust, high quality-factor Fano resonances. Our approach utilizes symmetry breaking of highly symmetric resonator…

Micro- and nanomechanical systems with exceptionally low dissipation rates are enabling the next-generation technologies of ultra-sensitive detectors and quantum information systems. New techniques and methods for lowering the dissipation…

Mesoscale and Nanoscale Physics · Physics 2022-07-15 Dennis Høj , Ulrich Busk Hoff , Ulrik Lund Andersen

We investigate the design, fabrication and experimental characterization of high Quality factor photonic crystal nanobeam cavities in silicon. Using a five-hole tapered 1D photonic crystal mirror and precise control of the cavity length, we…

An analysis is provided of the degradation that arises in the quality factor of a whispering gallery mode when a circular or spherical dielectric cavity is deformed. The large quality factors of such resonators are important to their use in…

Optics · Physics 2015-06-04 Michael M. White , Stephen C. Creagh

In Micro-electro-mechanical Systems (MEMS) based pressure sensors and acoustic devices, deflection of a membrane is utilized for pressure or sound measurements. Due to advantages of capacitive pressure sensor over piezoresistive pressure…

Applied Physics · Physics 2019-08-29 Rishabh Bhooshan Mishra , S Santosh Kumar , Ravindra Mukhiya

We have designed and characterized micro-electro-mechanical systems (MEMS) for applications at low temperatures. The mechanical resonators were fabricated using a surface micromachining process. The devices consist of a pair of parallel…

Mesoscale and Nanoscale Physics · Physics 2013-01-24 M. Gonzalez , P. Zheng , E. Garcell , Y. Lee , H. B. Chan

The measurement of a quantum system is often performed by encoding its state in a single observable of a light field. The measurement efficiency of this observable can be reduced by loss or excess noise on the way to the detector. Even a…