Related papers: 0-level Vacuum Packaging RT Process for MEMS Reson…
Due to the sensitivity of the piezoelectric layer in surface acoustic wave (SAW) resonators to temperature, a method of achieving device stability as a function of temperature is required. This work presents the design, modeling and…
As 5G connectivity proliferates, signal processing applications at 6G centimeter bands have gained attention for urban wireless capacity expansion. At sub-5 GHz, acoustic resonators operating in the fundamental symmetric (S0) Lamb mode hold…
Very small electromechanical coupling coefficient in micro-electromechanical systems (MEMS) or acoustic resonators is quite of a concern for oscillator performance, specially at mmWave frequencies. This small coefficient is the…
Micro-mechanical resonators are building blocks of a variety of applications in basic science and applied electronics. This device technology is mainly based on well-established and reproducible silicon-based fabrication processes with…
Metasurfaces exploit the ability to engineer the optical phase, amplitude and polarization at subwavelength dimensions providing unprecedented control of light. The realization of the all dielectric approach to metasurfaces has led to the…
We fabricated ambipolar field-effect transistors (FETs) from multi-layered triclinic ReSe2, mechanically exfoliated onto a SiO2 layer grown on p-doped Si. In contrast to previous reports on thin layers (~2 to 3 layers), we extract…
Quantum computers are close to become a practical technology. Solid-state implementations based, for example, on superconducting devices strongly rely on the quality of the constituent materials. In this work, we fabricate and characterize…
Exploiting quantum effects of mechanical motion, such as backaction evading measurements or squeezing, requires preparation of the oscillator in a high-purity state. The largest state purities in optomechanics to date have relied on…
We have developed a low temperature, high-resolution microwave surface impedance probe that is able to operate in high static magnetic fields. Surface impedance is measured by cavity perturbation of dielectric resonators, with sufficient…
Quantum computing, ultra-low-noise sensing, and high-energy physics experiments often rely on superconducting circuits or semiconductor qubits and devices operating at deep cryogenic temperatures (4K and below). Photonic integrated circuits…
The dielectric loss of silicon nitride (Si$_3$N$_4$) limits the performance of microwave-frequency devices that rely on this material for sensing, signal processing, and quantum communication. Using superconducting resonant circuits, we…
In RF-MEMS packaging, next to the protection of movable structures, optimization of package electrical performance plays a very important role. In this work, a wafer-level packaging process has been investigated and optimized in order to…
Sympathetic cooling with ultracold atoms and atomic ions enables ultralow temperatures in systems where direct laser or evaporative cooling is not possible. It has so far been limited to the cooling of other microscopic particles, with…
We developed a vacuum generation system composed of a reciprocating compressor (3 tons of refrigeration) with an inverted-function that is ready to be hooked flexibly to a gas-tight container to create an evacuated enclosed atmosphere,…
Employing amorphous superconductors, such as Type-II molybdenum silicide (MoSi), instead of crystalline materials significantly simplifies the material deposition and scalable nanoscale prototyping, beneficial for quantum electronic and…
The small mass and high coherence of nanomechanical resonators render them the ultimate force probe, with applications ranging from biosensing and magnetic resonance force microscopy, to quantum optomechanics. A notorious challenge in these…
Dielectric resonators are employed to build state-of-the-art low-noise and high- stability oscillators operating at room and cryogenic temperatures. A resonator temperature coefficient of frequency is one criterion of performance. This…
Depending on the type of Micro-Electro-Mechanical System (MEMS), packaging costs are contributing up to 80% of the total device cost. Each MEMS device category, its function and operational environment will individually dictate the…
This study employs advanced phase-field modeling to investigate Si-based qubit MOSFETs, integrating electrostatics and quantum mechanical effects. We adopt a comprehensive modeling approach, utilizing full-wave treatment of the Schrodinger…
The coherent manipulation of acoustic waves on the nanoscale usually requires multilayers with thicknesses and interface roughness defined down to the atomic monolayer. This results in expensive devices with predetermined functionality.…