Related papers: Modeling of a piezoelectric micro-scanner
A slicer mirror is a complex surface composed by many tilted and decentered mirrors sub-surfaces. The major difficulty to model such a complex surface is the large number of parameters used to define it. The Zemax's multi-configuration mode…
We present modeling and analysis of a hysteretic deformable mirror where the facesheet interacts with a continuous layer of piezoelectric material that can be actuated distributively by a matrix of electrodes through multiplexing. Moreover,…
Optics for future X-ray telescopes will be characterized by very large aperture and focal length, and will be made of lightweight materials like glass or silicon in order to keep the total mass within acceptable limits. Optical modules…
Flexible piezoelectric devices made of polymeric materials are widely used for micro- and nano-electro-mechanical systems. In particular, numerous recent applications concern energy harvesting. Due to the importance of computational…
Flexible piezoelectric devices made of polymeric materials are widely used for micro- and nano-electro-mechanical systems. In particular, numerous recent applications concern energy harvesting. Due to the importance of computational…
This paper presents an integrated multiphysics simulation approach of piezoelectric micropumps. Micropumps and micro blowers are essential devices in various cutting-edge industries like laboratory equipment, medical devices, and fuel…
An electronic speckle shearing phase-shifting pattern interferometer (ESSPPI) based on Michelson interferometer was based in this paper. A rotatable mirror driven by a step motor in one of its reflective arm is used to generate an…
We present a new kind of varifocal mirror with independently adjustable curvatures in the major directions. For actuation we use two stacked piezo bending actuators with crossed in-plane polarization. This mirror can be used for example as…
X-ray mirrors with high focusing performances are in use in both mirror modules for X-ray telescopes and in synchrotron and FEL (Free Electron Laser) beamlines. A degradation of the focus sharpness arises in general from geometrical…
We use a piezoelectric quartz tuning fork to calibrate the displacement of ceramic piezoelectric scanners which are widely employed in scanning probe microscopy. We measure the static piezoelectric response of a quartz tuning fork and find…
We present a new type of tunable mirror with sharply-featured freeform displacement profiles, large displacements of several 100\mu m and high operating frequencies close to the kHz range at 15mm diameter. The actuation principle is based…
We report the development of a scanning force microscope based on an ultra-sensitive silicon nitride membrane transducer. Our development is made possible by inverting the standard microscope geometry - in our instrument, the substrate is…
In this paper, static and dynamic behavior of an electro statically actuated torsional micro actuator is studied. The micro actuator is composed of a micro mirror and two torsional beams, which are excited with two electrodes. Unlike the…
In this paper, we focus on multi-scale modeling and simulation of piezoelectric composite materials. A multi-scale model for piezoelectric composite materials under the framework of Heterogeneous Multi-scale Method(HMM) is proposed. For…
We describe here the implementation of an interferometer-based microwave impedance microscope on a home-built tuning-fork based scanning probe microscope (SPM). Tuning-fork based SPMs, requiring only two electrical contacts for…
Miniaturized optical imaging systems typically utilize 2-dimensional (2D) actuators to acquire images over a 2D field of view (FOV). Piezoelectric tubes are most compact, but usually produce sub-millimeter FOVs and are difficult to…
We present the design and fabrication of a miniaturized array of piezoelectrically actuated high speed Fresnel mirrors with individual mirror control. These Fresnel mirrors can be used to generate propagation invariant and self-healing…
Dielectric tensor tomography is an imaging technique for mapping three-dimensional distributions of dielectric properties in transparent materials. This work introduces an enhanced illumination strategy employing a micro-electromechanical…
Optically resonant particles are key building blocks of many nanophotonic devices such as optical antennas and metasurfaces. Because the functionalities of such devices are largely determined by the optical properties of individual…
Multifunctional capability, flexible design, rugged lightweight construction, and self-powered operation are desired attributes for electronics that directly interface with the human body or with advanced robotic systems. For these and…