Related papers: A High-Q Microwave MEMS Resonator
Silica microresonators with an inverted-wedge shape were fabricated using conventional semiconductor fabrication methods. The measured quality factors of the resonators were greater than $10^6$ in 1550 nm band. Controllable coupling from…
The microwave cavity perturbation method is often used to determine material parameters (electric permittivity and magnetic permeability) at high frequencies and it relies on measurement of the resonator parameters. We present a method to…
Dielectric losses are one of the key factors limiting the coherence of superconducting qubits. The impact of materials and fabrication steps on dielectric losses can be evaluated using coplanar waveguide (CPW) microwave resonators. Here, we…
We develop an engineered microwave environment for coupling high Q superconducting resonators to quantum dots using a multilayer fabrication stack for the dot control wiring. Analytic and numerical models are presented to understand how…
Driven by narrow-linewidth bench-top lasers, coherent optical systems spanning optical communications, metrology and sensing provide unrivalled performance. To transfer these capabilities from the laboratory to the real world, a key missing…
We have studied superconducting coplanar-waveguide (CPW) resonators fabricated from disordered (granular) films of Aluminum. Very high kinetic inductance of these films, inherent to disordered materials, allows us to implement ultra-short…
This study investigates a high Q-factor spiral inductor fabricated by the CMOS (complementary metal oxide semiconductor) process and a post-process. The spiral inductor is manufactured on silicon substrate using the 0.35 micrometers CMOS…
Microwaves generated by optical techniques have demonstrated unprecedentedly low noise and hold significance in various applications such as communication, radar, instrumentation, and metrology. To date, the purest microwave signals are…
A sensor that integrates high sensitivity micro-Hall effect magnetometry and high-frequency electron paramagnetic resonance spectroscopy capabilities on a single semiconductor chip is presented. The Hall-effect magnetometer was fabricated…
In analogy to cavity optomechanics, enhancing specific sidebands of a Raman process with narrowband optical resonators would allow for parametric amplification, entanglement of light and molecular vibrations, and reduced transduction noise.…
Low-phase-noise microwave-frequency integrated oscillators provide compact solutions for various applications in signal processing, communications, and sensing. Surface acoustic waves (SAW), featuring orders-of-magnitude shorter wavelength…
This letter presents miniature millimeter wave (mmWave, above 30 GHz) acoustic resonators based on a single-layer thin-film lithium niobate (LN) platform. More specifically, we present high performance third-order antisymmetric (A3) mode…
High-stress Si$_3$N$_4$ nanoresonators have become an attractive choice for electro- and optomechanical devices. Membrane resonators can achieve quality factor ($Q$) - frequency ($f$) products exceeding $10^{13}$ Hz, enabling (in principle)…
We systematically study the performance of compact lumped element planar microwave $\mathrm{Nb_{70}Ti_{30}N}$ (NbTiN) resonators operating at 5 GHz in external in-plane magnetic fields up to 440 mT, a broad temperature regime from 2.2 K up…
This work presents the design, fabrication, and testing of X-Cut Lithium Niobate (LN) acoustic nanoelectromechanical (NEMS) Laterally Vibrating Resonators (LVRs) and Degenerate LVRs (d-LVRs) operating in the S0 (YZ30) and SH0 (YZ-10) modes…
Microwave reflectance probed photoconductivity (or $\mu$-PCD) measurement represents a contactless and non-invasive method to characterize impurity content in semiconductors. Major drawbacks of the method include a difficult separation of…
Monolithic integration of multiband (1.4~ 6.0 GHz) RF acoustic devices were successfully demonstrated within the same process flow by using the lithium niobate (LN) thin film on silicon carbide (LNOSiC) substrate. A novel surface mode with…
We report on fabrication of high Q lithium niobate (LN) whispering-gallery-mode (WGM) microresonators suspended on silica pedestals by femtosecond laser microfabrication. The micrometer-scale (diameter ~82 {\mu}m) LN resonator possesses a Q…
We address the scaling-up problem for superconducting quantum circuits by using lumped-element resonators based on an alternative fabrication method of aluminum -- aluminum oxide -- aluminum ($\mathrm{Al/AlO_x/Al}$) parallel-plate…
Q-enhanced racetrack micro-resonators for the silicon nitride photonics integration platform have been designed, fabricated and characterized. The proposed geometries permit to mitigate the impact of radiation loss at curved waveguides, one…