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Microelectromechanical systems (MEMS) gyroscopes are widely used, e.g. in modern automotive and consumer applications, and require signal stability and accuracy in rather harsh environmental conditions. In many use cases, device reliability…
Silicon-based micro-electromechanical systems (MEMS) can be fabricated using bulk and surface micromachining technology. A micro mirror designed as an oscillatory MEMS constitutes a prominent example. Typically, in order to minimize energy…
Carouseling is an efficient method to mitigate the measurement errors of inertial sensors, particularly MEMS gyroscopes. In this article, the effect of carouseling on the most significant stochastic error processes of a MEMS gyroscope,…
A new microbeam-rigid-body gyroscope is introduced and its static and dynamic behaviours are studied. The main structure includes a microbeam and an eccentric end-rigid-body influencing the dynamic and static characteristics of the sensor.…
Micro- and nanoelectromechanical system (MEMS and NEMS) resonators can exhibit rich nonlinear dynamics as they are often operated at large amplitudes with high quality factors and possess a high mode density with a variety of nonlinear…
The requirements pertaining to the reliability and accuracy of micro-electromechanical gyroscopic sensors are increasing,as systems for vehicle localization emerge as an enabling factor for autonomous driving. Since micro-electromechanical…
The dynamic behavior of a capacitive micro-electro-mechanical (MEMS) accelerometer is evaluated by using a theoretical approach which makes use of a squeeze film damping (SFD) model and ideal gas approach. The study investigates the…
Microelectromechanical systems (MEMS) gyroscopes are widely used in consumer and automotive applications. They have to fulfill a vast number of product requirements which lead to complex mechanical designs of the resonating structure.…
The eigenvalues of a new microbeam-rigid-body gyroscope are computed and studied to show the variation of frequencies versus the input spin rate. To this end, assuming the harmonic solution of the dynamic equation of motion the…
It is well known and has been shown that the gain performance of Gaseous Electron Multipliers (GEM) depends on the size of the holes. With an optical scanner it is possible to measure the dimensions of the holes, and to predict the…
This paper demonstrates a vibration test for a resonant MEMS scanning system in operation to evaluate the vibration immunity for automotive lidar applications. The MEMS mirror has a reinforcement structure on the backside of the mirror,…
In this paper, CFD approach is used to simulate the thermal behavior in a sensitive high-Q gyroscope. The electromagnetically driving wires, in which AC current flows, are treated as Joule heat sources in the model. We found that the…
To date, frequency-dependent squeezed light has been used to reduce quantum noise in interferometric gravitational wave detectors by 6.1 dB (a factor of two). Future upgrades and detectors aim to both reduce quantum noise by 10 dB (a factor…
The Scanning electron microscope (SEM) and Electron-Dispersive Spectroscope (EDS) are two highly effective instruments in the field of nanoscience and nanotechnology. The quality of these instruments is determined by various factors, with…
Some aspects of gravitational lensing by large scale structure (LSS) are investigated. We show that lensing causes the damping tail of the cosmic microwave background (CMB) power spectrum to fall less rapidly with decreasing angular scale…
Magnetometers, gyroscopes and accelerometers are commonly used sensors in a variety of applications. The paper proposes a novel gyroscope calibration method in the homogeneous magnetic field by the help of magnetometer. It is shown that,…
In this paper, we take a vibration-damping devices in the well-known physical experimental instrument--scanning tunneling microscope as the study base, and with the help of GeoGebra software, we explain in detail the principle of damping…
In this paper, the nonlinear squeeze-film damping (SFD) involving rarefied gas effect in the micro-electro-mechanical-systems (MEMS) is investigated. Considering the motion of structures (beam, cantilever, and membrane) in MEMS, the dynamic…
In recent decades, microelectromechanical systems (MEMS)-based gyroscopes have been employed to meet positioning and navigation demands of a plethora of commercially available devices. Most of such gyroscopes rely on electrostatic actuators…
Nonlinear elastic effects play an important role in the dynamics of microelectromechanical systems (MEMS). Duffing oscillator is widely used as an archetypical model of mechanical resonators with nonlinear elastic behavior. In contrast,…