Related papers: Multidomain lithium niobate microcantilever for sm…
Single-chip CMOS-based biosensors that feature microcantilevers as transducer elements are presented. The cantilevers are functionalized for the capturing of specific analytes, e.g., proteins or DNA. The binding of the analyte changes the…
Nanoscale biosensors are devices designed to detect analytes by combining biological components and physicochemical detectors. One of the well known methods of constructing these sensors is by using nanocantilevers. These microscopic…
In this review article, we focus on emerging nanocantilever based biological sensors and discuss the response of nanocantilevers towards bio-molecules capture. The article guides the reader through various modes of operation (e.g., static…
Piezoelectric micromachined ultrasonic transducers (PMUTs) are widely utilized in applications that demand mechanical resilience, thermal stability, and compact form factors. Recent efforts have sought to demonstrate that single-crystal…
For its many useful properties, including second and third-order optical nonlinearity as well as electro-optic control, lithium niobate is considered an important potential microcomb material. Here, a soliton microcomb is demonstrated in a…
We present a detailed modeling and characterization of our scalable microwave nanoprobe, which is a micro-fabricated cantilever-based scanning microwave probe with separated excitation and sensing electrodes. Using finite-element analysis,…
Sensitive transduction of the motion of a microscale cantilever is central to many applications in mass, force, magnetic resonance, and displacement sensing. Reducing cantilever size to nanoscale dimensions can improve the bandwidth and…
A nonuniform piezoelectric cantilever with enhanced amplitude of vibration at resonances is proposed. The cantilever made of lead zirconate titanate (type of PZT-5H) containing inversely poled piezoelectric domains shows an advantageous…
This work demonstrates a prototype bi-layer piezoelectric micromachined ultrasonic transducer (PMUT) based on transferred periodically poled piezoelectric film (P3F) X-cut lithium niobate (LN). Opposite in-plane polarizations in the…
We report the piezoresisitivity in magnetic thin films of FeGa and their use for fabricating self transducing microcantilevers. The actuation occurs as a consequence of both the ferromagnetic and magnetostrictive property of FeGa thin…
We present a lithium niobate multi-functional platform (LN-MFP) that integrates photoacoustic and thermoelastic spectroscopy with photodetection on a single chip. Utilizing LN's piezoelectric and thermoelastic properties and an optimized…
The purpose of this paper is to apply characteristics of residual stress that causes cantilever beams to bend for manufacturing a micro-structured gas flow sensor. This study uses a silicon wafer deposited silicon nitride layers,…
This novel piezoelectric zinc oxide (ZnO) thin film microcantilever was fabricated by micromachining technique. To release the cantilever, wet anisotropic etching of Silicon (Si) was performed by tetramethyl ammonium hydroxide (TMAH). The…
Flexible sensors made from organic bilayer films of molecular conductor on polymeric matrix have attracted many interest due to their simple fabrication with high potential for being scaled up, and for their high-performing…
We developed a process to fabricate nanoscale metallic gate electrodes on scanning probe cantilevers, including on the irregular surface of protruding cantilever tips. The process includes a floating-layer technique to coat the cantilevers…
Integrated chemical and biological sensors give advantages in cost, size and weight reduction and open new prospects for parallel monitoring and analysis. Biosensors based on nanoelectromechanical systems (NEMS) are the most attractive…
We present a "nanoladder" geometry that minimizes the mechanical dissipation of ultrasensitive cantilevers. A nanoladder cantilever consists of a lithographically patterned scaffold of rails and rungs with feature size $\sim$ 100 nm.…
A nanoscale receiver utilizing the cantilever of a carbon nanotube has been developed to detect phase information included in transmitted signals. The existing receiver consists of a phase detector and demodulator which employ a reference…
We have fabricated ferrite cantilevers in which their vibrational properties can be controlled by external magnetic fields. Submicron-scale cantilever structures were made from Y3Fe5O12 (YIG) films by physical etching combined with use of a…
Lithium niobate is a multi-functional material, which has been regarded as one of the most promising platform for the multi-purpose optical components and photonic circuits. Targeting at the miniature optical components and systems, lithium…