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Scanning Thermal Microscopy (SThM) uses micromachined thermal sensors integrated in a force sensing cantilever with a nanoscale tip can be highly useful for exploration of thermal management of nanoscale semiconductor devices. As well as…

Mesoscale and Nanoscale Physics · Physics 2015-05-30 P. Tovee , M. Pumarol , D. Zeze , Kevin Kjoller , O. Kolosov

Resistive RAM (RRAM) devices are candidates for neuromorphic computing devices in which the functionality lies in the formation and reversible rupture and gap-closing of conducting filaments in insulating layers. To explore the thermal…

Mesoscale and Nanoscale Physics · Physics 2025-01-31 Nele Harnack , Sophie Rodehutskors , Bernd Gotsmann

Scanning Thermal Microscopy (SThM) has become an important measurement tool for characterizing the thermal properties of materials at the nanometer scale. This technique requires a SThM probe that combines an Atomic Force Microscopy (AFM)…

Mesoscale and Nanoscale Physics · Physics 2024-05-01 R. Swami , G. Julie , S. Le-Denmat , G. Pernot , D. Singhal , J. Paterson , J. Maire , J. F. Motte , N. Paillet , H. Guillou , S. Gomes , O. Bourgeois

Scanning thermal microscopy (SThM) - a type of scanning probe microscopy that allows mapping thermal transport and temperatures in nanoscale devices, is becoming a key approach that may help to resolve heat dissipation problems in modern…

Mesoscale and Nanoscale Physics · Physics 2013-09-10 Maria Timofeeva , Alexey Bolshakov , Peter D. Tovee , Dagou A. Zeze , Vladimir G. Dubrovskii , Oleg V. Kolosov

Quantifying the temperature of microdevices is critical for probing nanoscale energy transport.Such quantification is often accomplished by integrating resistance thermometers into microdevices. However, such thermometers frequently become…

Mesoscale and Nanoscale Physics · Physics 2021-05-05 Amin Reihani , Shen Yan , Yuxuan Luan , Rohith Mittapally , Edgar Meyhofer , Pramod Reddy

The operation of resistive and phase-change memory (RRAM and PCM) is controlled by highly localized self-heating effects, yet detailed studies of their temperature are rare due to challenges of nanoscale thermometry. Here we show that the…

Scanning Thermal Microscopy (SThM) is a scanning probe technique aimed at quantitative characterization of local thermal properties at the length scale down to tens of nanometers. With many probe designs and approaches to interpretation of…

Materials Science · Physics 2024-09-12 Alexander Tselev

Nanoscale thermal properties are becoming of extreme importance for modern electronic circuits that dissipate increasing power on the length scale of few tens of nanometers, and for chemical and physical properties sensors and biosensors…

Instrumentation and Detectors · Physics 2013-06-07 Peter D. Tovee , Oleg V. Kolosov

Nanostructured materials, critical for thermal management in semiconductor devices, exhibit a strong size dependence in thermal transport. Studying thermal resistance variation across grain boundaries is critical for designing effective…

Instrumentation and Detectors · Physics 2026-03-12 Ram Munde , Heng-Ray Chuang , Raisul Islam

Accurate on-chip temperature sensing is critical for the optimal performance of modern CMOS integrated circuits (ICs), to understand and monitor localized heating around the chip during operation. The development of quantum computers has…

Cryogenic CMOS technology (cryo-CMOS) offers a scalable solution for quantum device interface fabrication. Several previous works have studied the characterization of CMOS technology at cryogenic temperatures for various process nodes.…

Applied Physics · Physics 2019-02-20 Chao Luo , Zhen Li , TengTeng Lu , Jun Xu , GuoPing Guo

Material thermal properties characterization at nanoscales remains a challenge even if progresses were done in developing specific characterization techniques like the Scanning Thermal Microscopy (SThM). In the present work, we propose a…

Applied Physics · Physics 2020-07-10 Gilles Pernot , Anas Metjari , Hadrien Chaynes , Mathieu Weber , Mykola Isaiev , David Lacroix

Resistance thermometry provides a time-tested method for taking temperature measurements. However, fundamental limits to resistance-based approaches has produced considerable interest in developing photonic temperature sensors to leverage…

Optics · Physics 2015-08-06 Haitan Xu , Mohammad Hafezi , J. Fan , J. M. Taylor , G. F. Strouse , Zeeshan Ahmed

We present a Raman-based Distributed Temperature Sensor (RDTS) with centimetre-scale resolution for thermographic analysis of electronic circuits. Temperature is measured along a single-mode fiber routed across a custom printed circuit…

We have performed thermal conductance measurements on individual single crystalline silicon suspended nanowires. The nanowires (130 nm thick and 200 nm wide) are fabricated by e-beam lithography and suspended between two separated pads on…

Mesoscale and Nanoscale Physics · Physics 2015-06-25 Olivier Bourgeois , T. Fournier , J. Chaussy

We present a new concept of scanning thermal nanoprobe that utilizes the extreme thermal conductance of a carbon nanotube (CNT) to channel heat between the probe and the sample. The integration of CNT in scanning thermal microscopy (SThM)…

Mesoscale and Nanoscale Physics · Physics 2013-05-28 Peter D. Tovee , Manuel E. Pumarol , Mark C. Rosamond , Robert Jones , Michael C. Petty , Dagou A. Zeze , Oleg V. Kolosov

10 H SiC thin films are potential candidates for devices that can be used in high temperature and high radiation environment. Measurement of thermal conductivity of thin films by a non-invasive method is very useful for such device…

This paper presents a fully-integrated CMOS temperature sensor for densely-distributed thermal monitoring in systems on chip supporting dynamic voltage and frequency scaling. The sensor front-end exploits a sub-threshold PMOS-based circuit…

Systems and Control · Electrical Eng. & Systems 2022-09-05 Benjamin Zambrano , Esteban Garzón , Sebastiano Strangio , Giuseppe Iannaccone , Marco Lanuzza

We present a superconducting microresonator thermometer based on two-level systems (TLS) that is drop-in compatible with cryogenic microwave systems. The operational temperature range is 50-1000~mK (which may be extended to 5~mK), and the…

Instrumentation and Detectors · Physics 2020-11-16 J. Wheeler , M. R. Vissers , M. Malnou , J. Hubmayr , J. N. Ullom , J. Gao

This work presents ThermoMesh, a passive thin-film thermoelectric mesh sensor designed to detect and characterize spatio-temporally sparse heat sources through conduction-based thermal imaging. The device integrates thermoelectric junctions…

Robotics · Computer Science 2026-05-05 Sajjad Boorghan Farahan , Ahmed Alajlouni , Jingzhou Zhao
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