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We report the development of a scanning force microscope based on an ultra-sensitive silicon nitride membrane transducer. Our development is made possible by inverting the standard microscope geometry - in our instrument, the substrate is…
In this paper, a novel fully 3D, microfluidic-oriented, gel-based, and low-cost highly stretchable resistive sensors have been presented. By the proposed method we are able to measure and discriminate all of the stretch, twist, and pressure…
Commercial six-axis force-torque sensors suffer from being some combination of expensive, fragile, and hard-to-use. We propose a new fiducial-based design which addresses all three points. The sensor uses an inexpensive webcam and can be…
This paper presents a novel multi-axis force-sensing approach in robotic minimally invasive surgery with no modification to the surgical instrument. Thus, it is adaptable to different surgical instruments. A novel 6-axis optical force…
The quantitative nanomechanical characterization of soft materials using the nanoindentation technique requires further improvements in the performances of instruments, including their force resolution in particular. A micro-machined…
We describe a transducer for low-temperature atomic force microscopy based on electromechanical coupling due to a strain-dependent kinetic inductance of a superconducting nanowire. The force sensor is a bending triangular plate (cantilever)…
A micro-pressure sensor with an isosceles trapezoidal beam-membrane (ITBM) is proposed in this paper, consisting of a square silicon membrane, four isosceles trapezoidal beams and four piezoresistors.To investigate how the elastic silicon…
In this study, we have proposed a new type of tactile sensor that is capable of detecting the stiffness of soft objects. The sensor consists of a brass cylinder with an axial bore. An iron core can easily move inside the bore. Three…
Sliding motion between two rough solids under light normal loading involves myriad micro-impacts between antagonist micro-asperities. Those micro-impacts are at the origin of many emerging macroscopic phenomena, including the friction…
Force and proximity sensors are key in robotics, especially when applied in collaborative robots that interact physically or cognitively with humans in real unstructured environments. However, most existing sensors for use in robotics are…
This paper presents a novel six-axis force/torque (F/T) sensor based on inductive sensing technology. Unlike conventional strain gauge-based sensors that require direct contact and external amplification, the proposed sensor utilizes…
Soft multi-axis force/torque sensors provide safe and precise force interaction. Capturing the complete degree-of-freedom of force is imperative for accurate force measurement with six-axis force/torque sensors. However, cross-axis coupling…
This study presents a novel, versatile traction force microscopy framework for quantifying three-dimensional (3D) interfacial forces during bio-adhesion by integrating in situ stereo digital image correlation with finite element (FE)…
A high sensitivity force sensor based on dielectric microspheres in vacuum, optically trapped by a single, upward-propagating laser beam, is described. Off-axis parabolic mirrors are used both to focus the 1064~nm trapping beam and to…
Multifunctional capability, flexible design, rugged lightweight construction, and self-powered operation are desired attributes for electronics that directly interface with the human body or with advanced robotic systems. For these and…
Properties of typical MEMS materials have been widely investigated. Mechanical properties of MEMS structures depend not only on the bulk material properties, but also structural factors. A measurement system has been made to measure…
Metal thin films on soft polymers provide a unique opportunity for resistance-based strain sensors. A mechanical mismatch between the conductive film and the flexible substrate causes cracks to open and close, changing the electrical…
We report on the development of 3D silicon sensors at the University of Science and Technology of China (USTC). The sensor involves columnar electrodes (5 um in diameter) of both doping types, etched from the same wafer side. The p+…
A strain sensor inspired by a Widlar self-biased current source topology called $\beta$-multiplier is developed to obtain a strain-dependent reference current with high supply rejection. The sensor relies on the piezoresistive effect in the…
We introduce a micromachined force scale for laser power measurement by means of radiation pressure sensing. With this technique, the measured laser light is not absorbed and can be utilized while being measured. We employ silicon…