Unusual Cathode Erosion Patterns Observed for Steered Arc Sources
Plasma Physics
2015-06-18 v1
Abstract
A cathodic arc source with a magnetron-type magnetic field was investigated for stability, erosion, and compatibility with a linear macroparticle filter. Here we report about unusual arc spot erosion patterns, which were narrow (~ 2 mm) with periodic pits when operating in argon, and broad (~ 10 mm) with periodic groves and ridges when operating in an argon and oxygen mixtures. These observations can be correlated with the ignition probability for type 2 and type 1 arc spots, respectively.
Cite
@article{arxiv.1402.2945,
title = {Unusual Cathode Erosion Patterns Observed for Steered Arc Sources},
author = {Jonathan Kolbeck and André Anders},
journal= {arXiv preprint arXiv:1402.2945},
year = {2015}
}
Comments
Manuscript submitted to the 7th Triennial Special Issue of the IEEE Transactions on Plasma Science "Images in Plasma Science," scheduled for publication in August 2014. Manuscript length is limited to 2 pages