Ultra-compact Si/In$_2$O$_3$ hybrid plasmonic waveguide modulator with a high bandwidth beyond 40 GHz
Applied Physics
2022-01-19 v1 Optics
Abstract
Optical modulators are required to have high modulation bandwidths and a compact footprint. In this paper we experimentally demonstrate a novel Si/InO hybrid plasmonic waveguide modulator, which is realized by an asymmetric directional coupler (ADC) consisting of a silicon photonic waveguide and a Si/InO hybrid plasmonic waveguide. The optical signal is modulated by radio-frequency (RF) signal applied on the Au electrodes at the top of MOS capacitor and contacting the InO thin film. The record-high modulation bandwidth of >40 GHz is realized by a silicon-doping-free metal-oxide-InO capacitor integrated in a 3.5-m-long asymmetric directional coupler (ADC) for the first time.
Keywords
Cite
@article{arxiv.2201.06258,
title = {Ultra-compact Si/In$_2$O$_3$ hybrid plasmonic waveguide modulator with a high bandwidth beyond 40 GHz},
author = {Yishu Huang and Jun Zheng and Bingcheng Pan and Lijia Song and Guanan Chen and Zejie Yu and Hui Ye and Daoxin Dai},
journal= {arXiv preprint arXiv:2201.06258},
year = {2022}
}