In this paper, we present a novel dual gap tuneable capacitor process based on the profile of the sacrificial layer. This profile involves a tri-layer photo-resist process with only one mask level. This realization is based on a special profile of the sacrificial layer designed by two picks. The mechanism of the sacrificial layer realisation is dependent on resist thickness, resist formulation (viscosity, type of polymer and/or solvent, additives...), design of the patterned layer (size or width) and the conditions under which this layer is prepared: thermal treatment, etch back processes... In this communication we demonstrate influence of the later parameters and discuss how a dual pick profile was achieved.
Cite
@article{arxiv.0802.3078,
title = {Tuneable Capacitor based on dual picks profile of the sacrificial layer},
author = {S. Soulimane and F. Casset and F. Chapuis and P. -L. Charvet and M. aïd},
journal= {arXiv preprint arXiv:0802.3078},
year = {2008}
}
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Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)