Systematic efficiency study of line-doubled zone plates
Materials Science
2017-05-09 v1
Abstract
Line-doubled Fresnel zone plates provide nanoscale, high aspect ratio structures required for efficient high resolution imaging in the multi-keV x-ray range. For the fabrication of such optics a high aspect ratio HSQ resist template is produced by electron-beam lithography and then covered with Ir by atomic layer deposition (ALD).
Cite
@article{arxiv.1705.02807,
title = {Systematic efficiency study of line-doubled zone plates},
author = {Felix Marschall and Joan Vila-Comamala and Vitaliy A. Guzenko and Christian David},
journal= {arXiv preprint arXiv:1705.02807},
year = {2017}
}