We have built a 45-cm long x-ray deformable mirror of super-polished single-crystal silicon that has 45 actuators along the tangential axis. After assembly the surface height error was 19 nm rms. With use of high-precision visible-light metrology and precise control algorithms, we have actuated the x-ray deformable mirror and flattened its entire surface to 0.7 nm rms controllable figure error. This is, to our knowledge, the first sub-nanometer active flattening of a substrate longer than 15 cm.
@article{arxiv.1402.1743,
title = {Sub-nanometer flattening of a 45-cm long, 45-actuator x-ray deformable mirror},
author = {L. A. Poyneer and T. McCarville and T. Pardini and D. Palmer and A. Brooks and M. J. Pivovaroff and B. Macintosh},
journal= {arXiv preprint arXiv:1402.1743},
year = {2015}
}
Comments
Revised version accepted by Applied Optics 24 Apr 2014