Stability of bakeable capacitance diaphragm gauges
Instrumentation and Detectors
2021-10-26 v1
Abstract
Here, we study the stability of capacitance diaphragm gauges. We focus on their stability before and after a controlled series of bakes. We find that baking results in appreciable shifts of the zero offset, but note that these can easily be corrected at time of use. Linearity however cannor be corrected at time of use, so it is essential to understand its effect if one wished to use similar gauges in a system that requires baking. For the gauges in this study, we find that baking introduces a minimal additional uncertainty, and that the total uncertainty can be kept to below about 0.3% at the k=2 confidence level (95%).
Cite
@article{arxiv.2110.13063,
title = {Stability of bakeable capacitance diaphragm gauges},
author = {Julia Scherschligt and Daniel Barker and Stephen Eckel and James Fedchak and Emmanuel Newsome},
journal= {arXiv preprint arXiv:2110.13063},
year = {2021}
}
Comments
5 pages, 6 figures