RF impedance measurements of DC atmospheric micro-discharges
Plasma Physics
2016-05-02 v1
Abstract
The available diagnostics for atmospheric micro-plasmas remain limited and relatively complex to implement; so we present a radio-frequency technique for diagnosing a key parameter here. The technique allows one to estimate the dependencies of the electron density by measuring the RF-impedance of the micro-plasma and analyzing it with an appropriate equivalent circuit. This technique is inexpensive, can be used in real time and gives reasonable results for argon and helium DC micro-plasmas in holes over a wide pressure range. The electron density increases linearly with current in the expected range consistent with normal glow discharge behavior.
Keywords
Cite
@article{arxiv.1604.08794,
title = {RF impedance measurements of DC atmospheric micro-discharges},
author = {Lawrence J. Overzet and D. Jung and Monali Mandra and Matthew Goeckner and Thierry Dufour and Remi Dussart and Philippe Lefaucheux},
journal= {arXiv preprint arXiv:1604.08794},
year = {2016}
}