Resistively loaded coplanar waveguide for microwave measurements of induced carriers

We describe the use of a coplanar waveguide whose slots are filled with resistive film, a resistively loaded coplanar waveguide (RLCPW), to measure two dimensional electron systems (2DES). The RLCPW applied to the sample hosting the 2DES provides a uniform metallic surface serving as a gate, to control the areal charge density of the 2DES. As a demonstration of this technique we present measurements on a Si MOSFET, and a model that successfully converts microwave transmission coefficients into conductivity of a nearby 2DES capacitively coupled to the RLCPW. We also describe the process of fabricating the highly resistive metal film required for fabrication of the RLCPW.