Precision of Evaluation Methods in White Light Interferometry: Correlogram Correlation Method
Instrumentation and Detectors
2017-10-20 v1
Abstract
In this paper we promote a method for the evaluation of a surface topography which we call the correlogram correlation method. Employing a theoretical analysis as well as numerical simulations the method is proven to be the most accurate among available evaluation algorithms in the common case of uncorrelated noise. Examples illustrate the superiority of the correlogram correlation method over the common envelope and phase methods.
Cite
@article{arxiv.1703.05570,
title = {Precision of Evaluation Methods in White Light Interferometry: Correlogram Correlation Method},
author = {Ilia Kiselev and Egor Kiselev and Michael Drexel and Michael Hauptmannl},
journal= {arXiv preprint arXiv:1703.05570},
year = {2017}
}
Comments
10 pages, 9 figures