Phase shifting Interferometry and Wavefront Compensation using Liquid Crystal on Silicon (LCOS) Spatial Light Modulator (SLM)
Optics
2025-06-13 v1
Abstract
We present a simple and novel technique for interferometric surface measurement using a Liquid Crystal on Silicon (LCOS) Spatial Light Modulator (SLM) as phase shifter and wavefront-compensator simultaneously. In comparison to a mechanical piezo-based phase shifter measurement, speed and measurement range can be increased by this approach.
Cite
@article{arxiv.2506.10602,
title = {Phase shifting Interferometry and Wavefront Compensation using Liquid Crystal on Silicon (LCOS) Spatial Light Modulator (SLM)},
author = {Indrani Bhattacharya and Marcus Petz and Rainer Tutsch},
journal= {arXiv preprint arXiv:2506.10602},
year = {2025}
}
Comments
11 pages, 6 figures