Fault detection and isolation (FDI) systems are critical for modern mechatronic production equipment, as their continuous operation is heavily dependent on the ability to detect and isolate faults in a timely and efficient manner. The aim of this paper is to address closed-loop aspects for linear systems and enable the application of well-known nullspace-based FDI synthesis conditions to mechatronic systems subject to actuator and sensor faults. These tailored FDI synthesis conditions are applied to a large-scale prototype wafer stage, showcasing the proposed approach through real experiments, thereby underlining the usefulness of the derived synthesis conditions for a wide range of production machines and scientific instruments.
@article{arxiv.2605.09689,
title = {Nullspace-based Fault Diagnosis for Closed-Loop Mechatronic Systems with Application to Semiconductor Equipment},
author = {Koen Classens and Jeroen van de Wijdeven and Maurice Heemels and Tom Oomen},
journal= {arXiv preprint arXiv:2605.09689},
year = {2026}
}