Surface Acoustic Wave (SAW) devices featuring Aluminum Scandium Nitride (AlScN) on a 4H-Silicon Carbide (SiC) substrate, offer a unique blend of high sound velocity, low thermal resistance, substantial piezoelectric response, simplified fabrication, as well as suitability for high-temperature and harsh environment operation. This study presents high-frequency SAW resonators employing AlScN thin films on SiC substrates, utilizing the second SAW mode (referred to as the Sezawa mode). The resonators achieve remarkable performance, boasting a K2 value of 5.5% and a maximum Q-factor (Qmax) of 1048 at 4.7 GHz, outperforming previous benchmarks. Additionally, a SAW resonator with a 960 nm wavelength attains 5.9 GHz frequency with record K2 (4.0%) and Qmax (887). Our study underscores the potential of the AlScN on SiC platform for advanced radio-frequency applications.
@article{arxiv.2311.08694,
title = {Near 6 GHz Sezawa Mode Surface Acoustic Wave Resonators using AlScN on SiC},
author = {Xingyu Du and Nishant Sharma and Zichen Tang and Chloe Leblanc and Deep Jariwala and Roy H. Olsson},
journal= {arXiv preprint arXiv:2311.08694},
year = {2023}
}
Comments
19 pages, 5 figures in main text and 3 figures in supplementary