Nanoscale positioning approaches for integrating single epitaxial quantum emitters with photonic nanostructures

Deterministically integrating single solid-state quantum emitters with photonic nanostructures serves as a key enabling resource in the context of photonic quantum technology. Due to the random spatial location of many widely-used solid-state quantum emitters, a number of positoning approaches for locating the quantum emitters before nanofabrication have been explored in the last decade. Here, we review the working principles of several nanoscale positioning methods and the most recent progress in this field, covering techniques including atomic force microscopy, scanning electron microscopy, confocal microscopy with \textit{in situ} lithography, and wide-field fluorescence imaging. A selection of representative device demonstrations with high-performance is presented, including high-quality single-photon sources, bright entangled-photon pairs, strongly-coupled cavity QED systems, and other emerging applications. The challenges in applying positioning techniques to different material systems and opportunities for using these approaches for realizing large-scale quantum photonic devices are discussed.