Micro-Ball Lens Array Fabrication in Photoresist Using Ptfe Hydrophobic Effect
Abstract
This paper presents a simple method to fabricate micro-ball lens and its array. The key technology is to use the hydrophobic characteristics of polyterafluoroethylene (PTFE) substrate. High contact angle between melted photoresist pattern and PTFE can generate micro-ball lens and its array. PTFE thin film was spun onto a silicon wafer and dried in oven. Photoresist AZ4620 was used to pattern micro-columns with different diameters 60, 70 and 80 m. A thermal reflow process then was applied to melt these micro-column patterns resulted in micro-ball lens array. The achieved micro-ball lens array with diameter 98 m was fabricated using 80 m in diameter patterns. This method provides a simple fabrication process and low material cost.
Cite
@article{arxiv.0711.3329,
title = {Micro-Ball Lens Array Fabrication in Photoresist Using Ptfe Hydrophobic Effect},
author = {Ruey-Fang Shyu and Hsiharng Yang and Wen-Ren Tsai and Jhy-Cherng Tsai},
journal= {arXiv preprint arXiv:0711.3329},
year = {2007}
}
Comments
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