We study the introduction of a third material, namely Zr, within a nanometric periodic Mg/Co structure designed to work as optical component in the extreme UV (EUV) spectral range. Mg/Co, Mg/Zr/Co, Mg/Co/Zr and Mg/Zr/Co/Zr multilayers are designed, then characterized in terms of structural quality and optical performances through X-ray and EUV reflectometry measurements respectively. For the Mg/Co/Zr structure, the reflectance value is equal to 50% at 25.1 nm and 45deg of grazing incidence and reaches 51.3% upon annealing at 200deg C. Measured EUV reflectivity values of tri-layered systems are discussed in terms of material order within a period and compared to the predictions of the theoretical model of Larruquert. Possible applications are pointed out.
@article{arxiv.1111.4546,
title = {Introduction of Zr in nanometric periodic Mg/Co multilayers},
author = {K. Le Guen and M. -H. Hu and J. -M. André and Philippe Jonnard and S. -K. Zhou and H. -C. Li and J. -T. Zhu and Z. -S. Wang and N. Mahne and Angela Giglia and S. Nannarone},
journal= {arXiv preprint arXiv:1111.4546},
year = {2011}
}