We introduce a method for using Fizeau interferometry to measure the intrinsic resolving power of a diffraction grating. This method is more accurate than traditional techniques based on a long-trace profiler (LTP), since it is sensitive to long-distance phase errors not revealed by a d-spacing map. We demonstrate 50,400 resolving power for a mechanically ruled XUV grating from Inprentus, Inc.
@article{arxiv.1707.08639,
title = {Intrinsic resolving power of XUV diffraction gratings measured with Fizeau interferometry},
author = {Samuel Gleason and Jonathan Manton and Janet Sheung and Taylor Byrum and Cody Jensen and Lingyun Jiang and Joseph Dvorak and Ignace Jarrige and Peter Abbamonte},
journal= {arXiv preprint arXiv:1707.08639},
year = {2017}
}